JPS6252957B2 - - Google Patents
Info
- Publication number
- JPS6252957B2 JPS6252957B2 JP55014530A JP1453080A JPS6252957B2 JP S6252957 B2 JPS6252957 B2 JP S6252957B2 JP 55014530 A JP55014530 A JP 55014530A JP 1453080 A JP1453080 A JP 1453080A JP S6252957 B2 JPS6252957 B2 JP S6252957B2
- Authority
- JP
- Japan
- Prior art keywords
- gate electrode
- source
- electrode
- gate
- active layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/80—FETs having rectifying junction gate electrodes
- H10D30/87—FETs having Schottky gate electrodes, e.g. metal-semiconductor FETs [MESFET]
- H10D30/877—FETs having Schottky gate electrodes, e.g. metal-semiconductor FETs [MESFET] having recessed gate electrodes
Landscapes
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1453080A JPS56112759A (en) | 1980-02-08 | 1980-02-08 | Formation of gate electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1453080A JPS56112759A (en) | 1980-02-08 | 1980-02-08 | Formation of gate electrode |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56112759A JPS56112759A (en) | 1981-09-05 |
JPS6252957B2 true JPS6252957B2 (en, 2012) | 1987-11-07 |
Family
ID=11863689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1453080A Granted JPS56112759A (en) | 1980-02-08 | 1980-02-08 | Formation of gate electrode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56112759A (en, 2012) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59147466A (ja) * | 1983-02-10 | 1984-08-23 | Sony Corp | シヨツトキ・バリア・ゲ−ト型fet |
JPS59175773A (ja) * | 1983-03-26 | 1984-10-04 | Mitsubishi Electric Corp | 電界効果トランジスタ |
JPS59224175A (ja) * | 1983-06-03 | 1984-12-17 | Nec Corp | 電界効果トランジスタ |
JPH06260507A (ja) * | 1993-03-05 | 1994-09-16 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
-
1980
- 1980-02-08 JP JP1453080A patent/JPS56112759A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS56112759A (en) | 1981-09-05 |
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