JPS6249984A - 基板清掃装置 - Google Patents

基板清掃装置

Info

Publication number
JPS6249984A
JPS6249984A JP18728285A JP18728285A JPS6249984A JP S6249984 A JPS6249984 A JP S6249984A JP 18728285 A JP18728285 A JP 18728285A JP 18728285 A JP18728285 A JP 18728285A JP S6249984 A JPS6249984 A JP S6249984A
Authority
JP
Japan
Prior art keywords
air
speed
board
substrate
blown out
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18728285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0326117B2 (cs
Inventor
鳥脇　雅雄
河上　錦家
智明 石野
吉村　信雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hakuto Co Ltd
Toyo Netsu Kogyo Kaisha Ltd
Original Assignee
Hakuto Co Ltd
Toyo Netsu Kogyo Kaisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hakuto Co Ltd, Toyo Netsu Kogyo Kaisha Ltd filed Critical Hakuto Co Ltd
Priority to JP18728285A priority Critical patent/JPS6249984A/ja
Publication of JPS6249984A publication Critical patent/JPS6249984A/ja
Publication of JPH0326117B2 publication Critical patent/JPH0326117B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP18728285A 1985-08-28 1985-08-28 基板清掃装置 Granted JPS6249984A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18728285A JPS6249984A (ja) 1985-08-28 1985-08-28 基板清掃装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18728285A JPS6249984A (ja) 1985-08-28 1985-08-28 基板清掃装置

Publications (2)

Publication Number Publication Date
JPS6249984A true JPS6249984A (ja) 1987-03-04
JPH0326117B2 JPH0326117B2 (cs) 1991-04-09

Family

ID=16203267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18728285A Granted JPS6249984A (ja) 1985-08-28 1985-08-28 基板清掃装置

Country Status (1)

Country Link
JP (1) JPS6249984A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009200286A (ja) * 2008-02-22 2009-09-03 Shinko Electric Ind Co Ltd 絶縁層の形成方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106638U (cs) * 1980-12-23 1982-07-01
JPS6071836A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd エアシヤワ−装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106638U (cs) * 1980-12-23 1982-07-01
JPS6071836A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd エアシヤワ−装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009200286A (ja) * 2008-02-22 2009-09-03 Shinko Electric Ind Co Ltd 絶縁層の形成方法

Also Published As

Publication number Publication date
JPH0326117B2 (cs) 1991-04-09

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