JPS6249984A - Substrate cleaner - Google Patents

Substrate cleaner

Info

Publication number
JPS6249984A
JPS6249984A JP18728285A JP18728285A JPS6249984A JP S6249984 A JPS6249984 A JP S6249984A JP 18728285 A JP18728285 A JP 18728285A JP 18728285 A JP18728285 A JP 18728285A JP S6249984 A JPS6249984 A JP S6249984A
Authority
JP
Japan
Prior art keywords
air
speed
board
substrate
blown out
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18728285A
Other languages
Japanese (ja)
Other versions
JPH0326117B2 (en
Inventor
鳥脇 雅雄
河上 錦家
智明 石野
吉村 信雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hakuto Co Ltd
Toyo Netsu Kogyo Kaisha Ltd
Original Assignee
Hakuto Co Ltd
Toyo Netsu Kogyo Kaisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hakuto Co Ltd, Toyo Netsu Kogyo Kaisha Ltd filed Critical Hakuto Co Ltd
Priority to JP18728285A priority Critical patent/JPS6249984A/en
Publication of JPS6249984A publication Critical patent/JPS6249984A/en
Publication of JPH0326117B2 publication Critical patent/JPH0326117B2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明はプリント基板等の製造ラインに設置する基板
清掃装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a board cleaning device installed in a production line for printed circuit boards and the like.

〔従来の技術〕[Conventional technology]

プリント基板製造ラインで印刷工程のところ1基板上に
塵埃があって、スクリーン印刷膜に塵埃が付着すると、
凡ての製品に塵埃を−しよに印刷してしまい、プリント
配線間の絶縁不良が起き。
When there is dust on one board during the printing process in a printed circuit board manufacturing line, and the dust adheres to the screen printing film,
Dust was printed all over the product, causing poor insulation between the printed wiring.

不良品が多く発生し歩留りが悪くなる。Many defective products occur, resulting in poor yield.

そこで基板上の塵埃を除く必要が生ずる。従来のやり方
で簡単なものフは第4図に示す如く、粘着テープをロー
ラ状にした粘看剤付ローラ50を基板10上に圧接して
基板10上の越埃52を除去しようとするものがある。
Therefore, it becomes necessary to remove dust on the substrate. A simple conventional method, as shown in FIG. 4, is to remove the excess dust 52 on the substrate 10 by pressing an adhesive roller 50 made of adhesive tape into a roller shape onto the substrate 10. There is.

図−1?51U基板10の送りローラ、矢印Rは基板の
移動方向、矢印Uは各ローラの回転方向を示している。
Figure 1: Feed rollers for the 51U substrate 10, arrow R indicates the direction of movement of the substrate, and arrow U indicates the direction of rotation of each roller.

この方法〒は初めは効果があるが、繰返し使用されてい
ると、すぐに粘着性が失われ、逆に基板上へ塵埃を付着
させることになシ、ローラ50の父換を頻繁に行なわな
ければならず、保守に難点があった。
This method is effective at first, but if it is used repeatedly, it will quickly lose its adhesion and will cause dust to adhere to the substrate, requiring frequent replacement of the roller 50. However, there were difficulties in maintenance.

次に第5図は従来の技術の別な装置60の側断面図、第
6図は第5図に示す装置をX方向からみた端面説明図で
ろって、Rは基板10の進入方向。
Next, FIG. 5 is a side sectional view of another conventional device 60, and FIG. 6 is an explanatory end view of the device shown in FIG.

Dは出口方向〒あり、第5図は第6図の上半分の基板の
清掃部分を示すY−Y方向矢視図に相当する。
D is in the exit direction, and FIG. 5 corresponds to the Y-Y direction arrow view showing the cleaning portion of the substrate in the upper half of FIG. 6.

図〒61は外板ケーシング、62は除電及び剥離用ブラ
シ、66、・・・は基板送りローラ、64はイオン発生
装置でろって、針状電極よりなり、イオンを発生させて
基板100表面にイオン風を当て基板表面の静電力で付
着している塵埃を中和させ、剥離しやすい状態にして除
電及び剥離用シラシロ2にて塵埃を剥離させ、バンカー
ルーツ々型吹出ノズル68から矢印a′t%示す如く清
浄空気を吹き出し、乱流空間に塵埃を浮遊させ、その空
気は矢印a′f示す如くプレフィルタ671大きい塵埃
をとり、送風機65によって、HEPAフィルタ66を
経て再び循還させる。第5図!点線で示すルー・S68
は反対側にあるルーツ々を示している。図に示す例では
基板の移動空間を仕切パネル70.71によって順次A
、B、Cの3室に分け、下流側に向うに従って空間の清
浄度を上げると共に、各室においても、イオン発生装置
64によって、くりかえし基板表面にイオン風を当て塵
埃の剥離及び基板表面の静電気の除電を行ない、基板表
面を清掃する。尚68はローラ、ブラシの駆動装置部を
示す。
In the figure, 61 is an outer plate casing, 62 is a brush for static elimination and peeling, 66, . Ion air is applied to neutralize the adhering dust using electrostatic force on the surface of the substrate, making it easy to peel off, and removing the dust using the static eliminating and peeling Shirashiro 2. Clean air is blown out as shown by t% to suspend dust in the turbulent space, and the air is passed through a pre-filter 671 to remove large dust as shown by the arrow a'f, and is circulated again via the HEPA filter 66 by the blower 65. Figure 5! Lou S68 indicated by dotted line
shows the roots on the opposite side. In the example shown in the figure, the movement space of the board is divided into A by partition panels 70 and 71.
, B, and C, and the cleanliness of the space increases toward the downstream side.In each room, an ion generator 64 repeatedly applies ion wind to the substrate surface to remove dust and remove static electricity from the substrate surface. Remove static electricity and clean the board surface. Reference numeral 68 indicates a drive unit for the rollers and brushes.

このような従来の装置では次のような欠点がめった。Such conventional devices often suffer from the following drawbacks.

(1)  基板表面に静電気力f付着している塵埃には
有効であるが、水分、油分を持つ粘着性の強い塵埃は清
掃↑きない。
(1) Although it is effective for cleaning dust that has adhered to the surface of the board due to electrostatic force, it cannot clean highly sticky dust that contains moisture and oil.

(2)空間が乱流域のため再付着が起き易い。(2) Because the space is a turbulent region, reattachment is likely to occur.

(31基板の移動方向のコンベア機長が長くなり。(The length of the conveyor machine in the direction of movement of the 31 board becomes longer.

大きな設置スペースを必要とする。Requires large installation space.

(4)装置が大きくなるので価格が高くなる。(4) Since the device becomes larger, the price becomes higher.

〔問題点を解決するための手段〕[Means for solving problems]

この発明においてはノズルから吹き出す高速清浄気流で
塵埃を吹きとばし、その際汚染されている外気が侵入し
ないようにその周辺に微風速の清浄空気を吹き出すよう
にし、プリント基板製造ラインにおける印刷前の工程に
おいて、洗浄乾燥工程fとれなかった塵埃及び再付着し
fc塵埃を少ないスペースフ完全にとり除き、さらに再
付着させないで印刷工程へ供給し、基板の製品の品質向
上及び歩留りの向上を図っている。
In this invention, dust is blown away by a high-speed clean air stream blown out from a nozzle, and clean air is blown out at a slight speed around the nozzle to prevent contaminated outside air from entering. In this process, the dust that did not pass through the cleaning and drying process F and the re-adhered dust are completely removed in a small space and then supplied to the printing process without being re-adhered, thereby improving the quality and yield of substrate products.

〔実施例〕〔Example〕

第1図、第2図、第6図はこの発明の一実施例40を示
し、第1図は側方からみた説明図、第2図は第1図のY
−Y方向矢視図、第6図は第2図の上半分の基板の洗浄
と送り部分の拡大図である。
1, 2, and 6 show an embodiment 40 of the present invention, FIG. 1 is an explanatory view seen from the side, and FIG.
-Y direction arrow view, FIG. 6 is an enlarged view of the cleaning and feeding portion of the substrate in the upper half of FIG.

図において41はケーシング筐体、42は基板10が入
って来たことを検知するビームスイッチ。
In the figure, 41 is a casing, and 42 is a beam switch that detects when the board 10 enters.

46は11宣体移動用キャスター、44はレベルアジャ
スター、45f′i操作盤、配電盤等を示す。Rは基板
の移動方向を示している。基板10がケーシング41に
入ってくると、ビームスイッチ42が検知し、可変速モ
ータ46が作動し、清掃ローラ11及び除電及び送りロ
ーラ15.・・・を矢印ui’示す方向に駆動する。1
6はローラ15の軸を示す。12は清掃ローラ11の軸
、16は軸のまわりのスポンジ状ゴム質部分、14に外
周の不織布部分を示す。この清掃ローラ11は送りロー
ラ15の約1.5倍の円周接線速度で回転し、基板の速
度と相対速度をもち、基板表面をこすり基板表面の塵埃
を剥離させる。この清掃ローラの軸12のまわりは前述
の如く発泡したスポンジ状の弾力あるゴム質で囲まれ、
外周は不織布↑めるからやわらかく基板をこすり基板に
キズをつけることはない。
46 indicates casters for moving the 11th body, 44 indicates a level adjuster, 45f'i operation panel, switchboard, etc. R indicates the direction of movement of the substrate. When the substrate 10 enters the casing 41, the beam switch 42 detects it, the variable speed motor 46 is activated, and the cleaning roller 11 and the neutralizing and feeding roller 15. ... is driven in the direction indicated by the arrow ui'. 1
6 indicates the axis of the roller 15. 12 is the shaft of the cleaning roller 11, 16 is a spongy rubbery part around the shaft, and 14 is a nonwoven fabric part on the outer periphery. The cleaning roller 11 rotates at a circumferential tangential speed approximately 1.5 times that of the feed roller 15, has a relative speed to the speed of the substrate, and scrapes the surface of the substrate to remove dust from the surface of the substrate. The shaft 12 of this cleaning roller is surrounded by foamed sponge-like elastic rubber as mentioned above.
The outer periphery is covered with non-woven fabric, so it rubs the board softly and does not scratch the board.

そして基板10の進行方向のこの清掃ロール11より前
方に高速吹き出しノズル1が約45°後方に傾いて設け
られ、約3QTrL/Secの高速気流が基板表面に吹
き付けられ、基板上の塵埃を吹きとげし後方に逃げる。
A high-speed blowing nozzle 1 is installed in front of this cleaning roll 11 in the direction of movement of the substrate 10, tilting backward at about 45 degrees, and a high-speed airflow of about 3QTrL/Sec is blown onto the surface of the substrate to blow away dust on the substrate. and run backwards.

(尚第1図〜第3図に示す実施例fは基板の片面のみを
清掃する装置の例が示されている。)この高速気流はタ
ーゼブロワ−60からダクト31を経て矢印a1で示す
如く上方のプレナムチャンバー5に入り、プレフィルタ
−4、HEPAフィルター3を介してプレナムダクト2
に入り。
(Embodiment f shown in FIGS. 1 to 3 is an example of an apparatus that cleans only one side of the substrate.) This high-speed airflow flows upward from the tarze blower 60 through the duct 31 as shown by the arrow a1. enters the plenum chamber 5 and passes through the pre-filter 4 and HEPA filter 3 to the plenum duct 2.
To enter the.

ノズル1から吹き出される。60′はター2!ロツク6
0の駆動モータを示す。
It is blown out from nozzle 1. 60′ is tar 2! Lock 6
0 drive motor is shown.

次に汚染外気の侵入を防ぐために、シロッコファン32
からの微風速空気はダク)55′1に経て矢印a2↑示
す如く上方のプレナムチャンバー5′に入り、プレフィ
ルタ−4’−I(EPAフィルター6′を介して吸気ダ
クト21及び26に入り、夫々有孔板22.24から約
0.51rL/ secの微風速の清浄空気が吹き出さ
れる。32′ハシロツコフアンの駆動モータ、又6はプ
レナムチャンノ々−5,5′間の仕切りである。
Next, in order to prevent contaminated outside air from entering, the sirocco fan 32
The low wind speed air from the duct) 55'1 enters the upper plenum chamber 5' as shown by the arrow a2↑, enters the intake ducts 21 and 26 via the pre-filter 4'-I (EPA filter 6', Clean air at a slight wind speed of about 0.51 rL/sec is blown out from the perforated plates 22 and 24. 32' is the drive motor for the hashirotsuko fan, and 6 is a partition between the plenum channel holes 5 and 5'.

これらの高速及び微風速で吹き出された空気の一部に吸
引ダクト25又は28に吸われる。矢印f′t%示す如
く吸引ダクト25に吸込口26から吸引された空気は左
右のダクトホース34.35によって、又吸引ダクト2
8に吸引孔29から吸引された空気はダクトホース36
.67によって。
A part of the air blown out at these high speeds and low wind speeds is sucked into the suction duct 25 or 28. As shown by the arrow f't%, the air sucked into the suction duct 25 from the suction port 26 is passed through the left and right duct hoses 34, 35 and into the suction duct 2.
The air sucked from the suction hole 29 into the duct hose 36
.. By 67.

夫々集合チャンA−38に導かれ、シロッコファン62
に戻る。又空気の残部は矢印fで示す如くM孔板27か
ら下方のケーシング41内にゆきター2ゾロワ30にゆ
く。ケーシング41には外気と連通ずる有孔板部分47
を設け、冷却も兼ねて外気を取り入れている。(尚基板
は一定間隔f送られてくるの1.ノズルの下に丁度基板
がない時は、高速空気はそのま\下部の吸引ダクト28
に吸いこまれる。) 清掃ローラ11は中実〒コンベア巾全体に亘っているが
、除電及び送90−ラ15.・・・は9mm巾程度!弾
力のあるゴムでできており、軸方向に約70mmのピッ
チ受段けられる。5〜10KQ程度の電気抵抗の導電性
″t%あるから基板上の静電気を十分アースマきる。高
速気流〒このローラをも清掃fきる。スルて導電性ff
1iるの〒、除電する機会が多く静電気を逃がすのに好
都合である。除電及び送90−ラ、清掃ローラは十分弾
力があるのマ。
Guided by Chan A-38, Sirocco fans 62
Return to The remainder of the air flows from the M-hole plate 27 into the lower casing 41 and into the air filter 30 as shown by arrow f. The casing 41 has a perforated plate portion 47 that communicates with the outside air.
is installed to bring in outside air for cooling purposes. (Note that the substrate is sent at regular intervals f1. When there is no substrate just below the nozzle, the high-speed air is sent directly to the suction duct 28 at the bottom.
be sucked into. ) The cleaning roller 11 is solid and covers the entire width of the conveyor, but the cleaning roller 11 is solid and covers the entire width of the conveyor. ...is about 9mm wide! It is made of elastic rubber and has a pitch of about 70 mm in the axial direction. Since it has a conductivity of about 5 to 10KQ of electrical resistance, it can sufficiently remove static electricity on the board.High-speed airflow can also clean this roller.
It is convenient to dissipate static electricity because there are many opportunities to eliminate static electricity. The static eliminating and feeding 90-ra and cleaning rollers should be sufficiently elastic.

基板の厚みが変化しても0.5〜2mm位の変化は十分
カバーでき、又ローラも70mmピッチ〒並んフいるの
で、150myn平方〜610順平方位ま〒基板の大き
さが変化しても力・ζ−〒きる。
Even if the thickness of the board changes, it can sufficiently cover changes of about 0.5 to 2 mm, and since the rollers are lined up at a pitch of 70 mm, the force will be reduced even if the size of the board changes from 150 myns square to 610 square feet.・ζ−〒kiru.

基板がある一定間隔(例えば6秒間隔)で送られてこな
い場合1例えば5分間程度の他のラインの故障等1基板
が送られてこない場合、オフディレータイマーを組みこ
むことにより1例えば10秒以上送られてこない場合は
自動運転休止とするようにすることにより、自動運転も
可能である。
If the board is not sent at a certain interval (for example, every 6 seconds) 1 If a board is not sent due to a failure in another line for example 5 minutes, by incorporating an off-delay timer 1 For example 10 seconds Automatic operation is also possible by suspending automatic operation if no more information is sent.

清掃ローラは長期間使用すると汚れてくるのフ、ワンタ
ッチで交換できるようにすることは勿¥afある。
The cleaning roller gets dirty when used for a long time, so it is of course better to be able to replace it with one touch.

第7図はこの発明を基板10の両面清掃に応用した装道
80の概念的説明図を示す。81はケーシング、90は
ビームスイッチ、11は清掃ロール、15は送りロール
を示し、Rは基板の移動向。
FIG. 7 shows a conceptual explanatory diagram of a path 80 in which the present invention is applied to cleaning both sides of the substrate 10. 81 is a casing, 90 is a beam switch, 11 is a cleaning roll, 15 is a feed roll, and R is the moving direction of the substrate.

Uはロールの回転方向フある。高速空気はプレナムダク
)84.84から高速吹き出しノズル85゜85から吹
き出す。微風速空気は給気ダクト82゜86から有孔板
83.87を経て吹き出し、空気は吸引ダクト88に孔
89から吸引される。このように上下対称に構成すれば
よい。
U is the direction of rotation of the roll. The high-speed air is blown out from the plenum duct) 84.84 and from the high-speed blowout nozzle 85°85. Light velocity air is blown out from the supply air ducts 82, 86 through the perforated plates 83, 87, and the air is sucked into the suction duct 88 through the holes 89. In this way, it may be configured vertically symmetrically.

〔効果〕〔effect〕

(1)湿気のある粘着力の強い塵埃をも完全清掃fきる
(1) Completely cleans even moist and highly adhesive dust.

(2)剥離した塵埃が基板に再付着しない。(2) Peeled dust does not adhere to the substrate again.

(3) コンベア長さが短くtき、(従来のものの約1
)省スペース化になる。
(3) The length of the conveyor is short (about 1 t) compared to the conventional one.
) Saves space.

(4)ローラの保守期間が大巾に伸びる。(4) The maintenance period for the rollers is significantly extended.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の実施例の側面説明図、第2図は第1
図のY−Y矢視図、第3図は第2図の部分拡大図、第4
図は従来の例の説明図、第5図は別な従来の例の説明図
、第6図は第5図のX方向矢視図、第7図はこの発明の
第2実施例の概念説明図1ある。 符号の説明 1・・・高速吹き出しノズル、  2・・・プレナムダ
クト。 6・・・HEPAフィルター、 4・・・プレフィルタ
−15・・・プレナムチャンノ々−16・・・仕切り。 11・・・清掃ローラ、  12・・・軸、  13・
・・ゴム部分、14・・・不織布、  15・・・ロー
ラ、  16・・・軸。 21・・・給気ダクト、 22・・・有孔板、26・・
・給気ダクト、 24・・・有孔板。 25・・・吸引ダクト、  26・・・吸引孔。 27・・・有孔板、 28・・・吸引ダクト、  29
・・・孔。 60・・・ター2ゾロワ、  30′・・・モータ。 31・・・ダクト、  32・・・シロッコファン。 62′・・・モータ、  63・・・ダクト。 34.35,36.37・・・ダクトホース。 38・・・集合チャンノ々−141・・・ケーシング筺
体、42・・・ビームスイッチ、  46・・・キャス
ター。 44・・・レベルアジャスター。 45・・・配電盤、操作盤、 46・・・モータ。 47・・・外気椴入肩孔板、  50・・・粘着剤付ロ
ーラ、50・・・送りローラ、  61・・・ケーシン
グ、62・・・ブラシ、  66・・・送ジローラ。 64・・・イオン発生装置、 65・・・送風機。 66・・・HEPAフィルタ、  67・・・プレフィ
ルタ、68・・・吹き出しノズル、 69・・・ローラ
駆動装置。 70.71・・・仕切パネル、 81・・・ケーシング
、82・・・給気ダクト、  83・・・有孔板。 84・・・プレナムダクト、85・・・高速吹き出しノ
ズル。 86・・・給気ダクト、 87・・・有孔板。 88・・・吸気ダクト、  89・・・吸引孔。 第  4  図 第  1i1 第  2  図
FIG. 1 is a side explanatory view of an embodiment of the invention, and FIG.
Y-Y arrow view in the figure, Figure 3 is a partially enlarged view of Figure 2, Figure 4
Figure 5 is an explanatory diagram of a conventional example, Figure 5 is an explanatory diagram of another conventional example, Figure 6 is a view taken in the X direction of Figure 5, and Figure 7 is a conceptual explanation of a second embodiment of the present invention. There is Figure 1. Explanation of symbols 1...High speed blowing nozzle, 2...Plenum duct. 6...HEPA filter, 4...Prefilter-15...Plenum channels-16...Partition. 11...Cleaning roller, 12...Shaft, 13.
...Rubber part, 14...Nonwoven fabric, 15...Roller, 16...Shaft. 21...Air supply duct, 22...Perforated plate, 26...
・Air supply duct, 24... perforated plate. 25... Suction duct, 26... Suction hole. 27... Perforated plate, 28... Suction duct, 29
...hole. 60...Tar 2 Zorova, 30'...Motor. 31...Duct, 32...Sirocco fan. 62'...Motor, 63...Duct. 34.35, 36.37... Duct hose. 38...Collection channels-141...Casing housing, 42...Beam switch, 46...Casters. 44...Level adjuster. 45...Switching board, operation panel, 46...Motor. 47...Shoulder hole plate for outside air intake, 50...Roller with adhesive, 50...Feed roller, 61...Casing, 62...Brush, 66...Feed roller. 64...Ion generator, 65...Blower. 66... HEPA filter, 67... Pre-filter, 68... Blowout nozzle, 69... Roller drive device. 70.71...Partition panel, 81...Casing, 82...Air supply duct, 83...Perforated plate. 84...Plenum duct, 85...High speed blowing nozzle. 86...Air supply duct, 87...Perforated plate. 88...Intake duct, 89...Suction hole. Figure 4 Figure 1i1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] プリント基板等の製造ラインに設ける基板清掃装置にお
いて、基板移動方向に対して斜め後方吹出角度を持つ高
速空気吹き出しノズルから高速清浄空気を吹き出すと共
に、その周辺には有孔板から、上記の高速清浄空気より
もいちぢるしく低速の微風速清浄空気を吹き出し、これ
ら両方の空気は再び高速空気用ならびに微風速空気用の
送風機に循還させ、導電性ゴムローラによつて基板の送
り及び静電気の除電を行うようにしたことを特徴とする
基板清掃装置。
In a board cleaning device installed in a production line for printed circuit boards, etc., high-speed clean air is blown out from a high-speed air blowing nozzle that has a rearward blowing angle diagonally with respect to the board movement direction, and the above-mentioned high-speed clean air is blown out from a perforated plate around the nozzle. Clean air is blown out at a slightly slower speed than air, and both of these airs are circulated again to the blowers for high-speed air and low-speed air, and conductive rubber rollers are used to feed the board and eliminate static electricity. A board cleaning device characterized in that it performs the following.
JP18728285A 1985-08-28 1985-08-28 Substrate cleaner Granted JPS6249984A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18728285A JPS6249984A (en) 1985-08-28 1985-08-28 Substrate cleaner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18728285A JPS6249984A (en) 1985-08-28 1985-08-28 Substrate cleaner

Publications (2)

Publication Number Publication Date
JPS6249984A true JPS6249984A (en) 1987-03-04
JPH0326117B2 JPH0326117B2 (en) 1991-04-09

Family

ID=16203267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18728285A Granted JPS6249984A (en) 1985-08-28 1985-08-28 Substrate cleaner

Country Status (1)

Country Link
JP (1) JPS6249984A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009200286A (en) * 2008-02-22 2009-09-03 Shinko Electric Ind Co Ltd Forming method of insulating layer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106638U (en) * 1980-12-23 1982-07-01
JPS6071836A (en) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd Air shower device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106638U (en) * 1980-12-23 1982-07-01
JPS6071836A (en) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd Air shower device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009200286A (en) * 2008-02-22 2009-09-03 Shinko Electric Ind Co Ltd Forming method of insulating layer

Also Published As

Publication number Publication date
JPH0326117B2 (en) 1991-04-09

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