JPH0349637B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for cleaning films, etc. in a line for manufacturing and using films.

[Conventional technology]

2. Description of the Related Art Cleaning films, plates, etc. using a cleaning roll has been conventionally practiced. FIG. 3 is an explanatory diagram of the configuration of a conventional device, and FIG. 4 is a system diagram of its airflow, where 48 is a casing housing, 42
10 indicates a beam switch that detects the arrival of a film, plate, etc. 10, and R indicates the moving direction of the film, plate, etc. When a film, plate, etc. 10 enters the casing 48, the beam switch 42 detects this, and the cleaning roller 49, feed roller 15, etc. are driven, and each roller is rotated in the direction of arrow U. Films, plates, etc. 10
is first scrubbed by the static eliminating brush 52 to clean dust adhering to the end surface. A high-speed blowout nozzle 50 is provided in front of the cleaning roller 49 in the direction of movement of the film, etc. 10 and is inclined at about 45 degrees toward the cleaning roller.
A high-speed air current G of approximately 80 m/sec is blown onto the plate surface, blowing away the dust on the plate. At the same time, air G with a volume of approximately 20% of the volume of air flow G is induced.

Next, the film 10 is sent to a cleaning roller 49. This cleaning roller 49 rotates at a circumferential tangential speed faster than the feed roller 15, has a relative speed to the speed of the film etc. 10, and scrubs the surface of the film etc.
Remove dust from the plate surface.

After the film, etc. 10 passes through the cleaning roller 49, dust on the surface of the film, etc. 10 is removed by a high airflow H of approximately 80 m/sec from a high-speed blowing nozzle 51 installed at an angle of approximately 45 degrees to the cleaning roller. blown away. At the same time, air h with a volume of approximately 20% of the volume of air blown out from H is sucked.

The high-speed airflows G and H blown out from these high-speed blowout nozzles 50 and 51 flow from the blower 60 through the duct hose 63 to the plenum chamber 64.
enter, prefilter 65, HE PA filter 6
6. Through the diversion chamber 67, the diversion chamber 67
The air is divided into duct hoses 68 and 69, enters air supply chambers 53 and 55, and is blown out from high-speed air outlets 50 and 51. Supply air chambers 53 and 5
A part of the air that entered 5 flows through the small hole 70 to the nozzle 50.
The air enters the expansion chamber 57 at almost the same high speed as the blowing air from the expansion chamber 70 and the clean chamber 7 , expands and diffuses to a slight wind speed of about 0.5 m/sec, and the clean chamber 7
1, at which time some air is discharged from the plate outlet 58 to the outside of the casing. If the outside of the machine is in a clean room, etc., it may be slightly sucked inward.
The air entering the clean chamber 71 is a high-speed airflow H.
This results in an airflow h drawn toward the cleaning roller 49 side. Also, due to the high airflow G, the air on the plate inlet side becomes an induced airflow G. The high-speed airflows G and H and the induced airflows g and h are transferred from the suction chambers 54 and 56 to the collection chamber 74 via the duct hoses 72 and 73.
and return to the turbo blower 60.

As shown in the airflow system diagram in FIG. 4, the outside air I is released from the inlet side of the film etc. in balance with the exhaust EX ₁ coming out from the exhaust hole 75 of the branch chamber 67 and the exhaust EX ₂ coming out from the exit 58 of the film etc. Coming in.

[Problems to be solved]

(1) In conventional devices, the cleaning means uses a roller made of non-woven fabric to scrape dust off the surface of the object to be cleaned.
This method uses a high-speed airflow to blow away dust, so it is effective for relatively large dust of about 10 microns or more, but the high-speed airflow creates a boundary layer of air on the surface of the object to be cleaned, and small particles within the boundary layer. The removal rate of dust of about several meters was poor.

(2) Scratches occur on the surface of objects to be cleaned, such as soft films, due to the rubbing by the non-woven roller.

(3) After dust adheres to the surface of the non-woven fabric roller, it is not sufficiently removed and the dust gradually accumulates on the roller surface, and the dust re-adheres to the object to be cleaned, and the object of cleaning such as soft film is caused by the dust. It may cause scratches on the surface of the object.

(4) If the object to be cleaned is a hard plate-like object, there may be some warpage and the elasticity of the nonwoven fabric roller will not follow suit, or even if it does, there will be places where the object to be cleaned is rubbed strongly and places where it is rubbed weakly. When cleaning was possible, the distribution of cleaning levels was poor.

[Means for solving problems]

In order to solve the conventional drawbacks, this invention arranges cleaning means such as cylindrical cloth above and below the object to be cleaned such as film so as to be in contact with the object to be cleaned, and blows air into the inside of the cylindrical cloth. Pressure is applied to maintain the cylindrical shape.
A pair of high-speed air blowing nozzles that blow diagonally forward and diagonally backward with respect to the moving direction of the object to be cleaned are provided on the upper and lower surfaces of the object to be cleaned, with the cleaning means in between,
High-speed clean air is blown out from the nozzle, and exhaust duct chambers are arranged above and below the cylindrical cleaning means.

〔Example〕

The basic structure of this invention is the same as the conventional apparatus shown in FIGS. 3 and 4, but the cleaning means is different. FIG. 1 is a conceptual explanatory diagram of the structure of the present invention, and FIG. 2 is an enlarged explanatory diagram of the cleaning section, in which an object to be cleaned, such as a film, is fed as indicated by arrow R. (As mentioned above, the structure of this invention is the third
It is basically the same as that shown in FIGS. 4 and 4, and detailed configurations other than essential parts are omitted in FIG. ) In the figure, 1 is the casing housing, 2,
2' is an air supply duct hose, 3, 3' is an air supply chamber, 4, 4' is an air blowing nozzle, 5, 5' is an exhaust duct chamber, 6, 6' is an exhaust duct hose,
7 and 7' are cleaning rollers made of cloth.

Pressurized air is also blown into the interior of the fabric rollers 7, 7', keeping the rollers in a cylindrical shape, and escaping uniformly to the outside through the gaps between the fibers of the fabric weave. The distance of the upper and lower rollers can be adjusted. Use a soft cloth (for example, clean room wiping cloth).

To explain with the enlarged view of Fig. 2, the air supply duct 3,
Clean pressurized air P in 3' is blown out diagonally rearward from nozzles 4, 4' in the figure. The blowing airflow is indicated by B. Also, induced airflow A from inside the clean room
occurs. On the other hand, clean air is introduced into the cleaning rollers 7, 7' made of cloth, inflates the rollers to keep them in a cylindrical shape, and passes uniformly to the outside through the fibers. The air flow through the cloth is indicated by C. The roller is in contact with the object to be cleaned 10 within a length L as shown. This condition can be adjusted by changing the spacing between the rollers as described above. Dust adhering to the surface of an object to be cleaned, such as a film, is peeled off from the object to be cleaned, such as a film, due to friction with the cloth, and blown away by the high-speed airflow flowing through the gap between the weave of the cloth and the object to be cleaned. The air then exits the gap and becomes a horizontal airflow D. This airflow D collides with the blowout airflow B from the nozzles 4 and 4', forming a vertical upward airflow E, which enters the exhaust duct chambers 5 and 5'.
Enters the exhaust duct hoses 6, 6' as reflux F,
Reflux to the blower. This airflow circulation is basically the same as that shown in FIG. If the airflow speed of the airflow B blown from the nozzle is made faster than the speed of the horizontal airflow D, dust will not come into the room and contamination of the interior of the clean room can be prevented.

Note that other means include vacuum suction or physical shielding. Furthermore, by selecting a cloth made of a softer material than the object to be cleaned, such as a film, it is possible to prevent scratches from occurring due to friction caused by wiping. Furthermore, even if a boundary layer is to be formed on the surface of the object to be cleaned, such as a film, the unevenness of the weave of the cloth, the unevenness of the fibers of the cloth, etc. inhibit its development, making it difficult to form a boundary layer. Therefore, in the past, relatively small dust particles in the boundary layer could not be separated and removed by wind alone. However, in this invention, the boundary layer is destroyed by the unevenness of the texture and the unevenness of the fluff of the fibers, and even relatively small dust particles can be removed.
In the figure, K indicates dust.

Dust is removed within the contact area L of the cloth, but even if dust particles try to adhere to the cloth, clean air is blown out from the weave and between the fibers of the cloth, making it difficult for the dust particles to adhere. Of course, if you use it for a long time, it will accumulate little by little, and eventually you will need to replace it. By rotating the cylindrical cleaning roller 7 in the direction a or b in the figure, the uneven surface of the cloth moves and even smaller particles can be removed. Furthermore, since the entire circumference of the circular cloth other than the contact area is used, the effect of wiping and preventing dust particles from adhering to the cloth is enhanced, and the life of the cylindrical cleaning roller can be extended.

Internal pressure is applied inside the cylindrical cloth cleaning roller, and it can be evenly pressed against the object to be cleaned using Pascal's principle, and even if the object to be cleaned has some warpage or undulations, it can be cleaned evenly and the cleaning degree distribution is improved. Furthermore, by making the interval between the upper and lower cylindrical cloth cleaning rollers variable, the dimension of the contact line L changes, the speed of the horizontal airflow changes, and the wiping area increases or decreases, making it possible to control the degree of cleaning. Furthermore, by making the rotation speed of the cylindrical cloth cleaning roller variable, it is possible to control the degree of cleaning, the prevention of dust particles from adhering to the cloth, and the rate at which dust particles are peeled off and scattered from the cloth even if they adhere to the cloth. You can control your lifespan. On top of that,
By changing the internal pressure of the cylindrical cloth cleaning roller, you can control the degree of cleaning, the degree of dust adhesion, and the lifespan of the cloth.

〔effect〕

(1) The present invention can remove dust particles as small as several microns, whereas the conventional device removes dust particles as small as about 10 microns.

(2) No scratches on the surface of the object to be cleaned.

(3) The cylindrical cleaning means does not attract dust easily.

(4) Even if the object to be cleaned has some warpage, it can be cleaned evenly and the cleaning degree distribution is improved.

(5) By adjusting the internal pressure, rotation speed, rotation direction, and vertical spacing of the cylindrical cloth, etc., the degree of cleaning and the degree of removal of dust attached to the surface of the cleaning means can be controlled.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram of the configuration of the device of this invention, and FIG.
The figure is an enlarged view of the cleaning part, FIG. 3 is an explanatory diagram of the conventional device, and FIG. 4 is an airflow system diagram thereof. Explanation of symbols, 1...Casing housing, 2...Air supply duct hose, 3...Air supply chamber, 4...Blowout nozzle, 5...Exhaust duct chamber, 6...
Exhaust duct hose, 7... Cylindrical cloth cleaning roller.

Claims (1)

[Claims] 1. In a film cleaning device, cleaning means such as cylindrical cloth are arranged above and below the object to be cleaned so as to be in contact with the object, and air is blown or heated inside the cylindrical cloth, etc. A pair of high-speed air blowing nozzles that blow diagonally forward and diagonally backward with respect to the moving direction of the object to be cleaned are held on the upper and lower surfaces of the object to be cleaned, with the cleaning means in between, and high-speed air is emitted from the nozzles. A cleaning device for films, etc., which blows out clean air and is characterized in that exhaust duct chambers are arranged above and below a cylindrical cleaning means. 2. The apparatus for cleaning films and the like according to claim 1, characterized in that the cylindrical cleaning means is rotated. 3. A cleaning device for films, etc. as set forth in claim 1, characterized in that the cylindrical cleaning means is movable up and down. 4. The apparatus for cleaning films and the like as set forth in claim 1, characterized in that the internal pressure of the cylindrical cleaning means can be adjusted.