JPS6249631A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6249631A
JPS6249631A JP6554286A JP6554286A JPS6249631A JP S6249631 A JPS6249631 A JP S6249631A JP 6554286 A JP6554286 A JP 6554286A JP 6554286 A JP6554286 A JP 6554286A JP S6249631 A JPS6249631 A JP S6249631A
Authority
JP
Japan
Prior art keywords
atoms
wafer
oxygen concentration
defects
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6554286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0351295B2 (cs
Inventor
Takanori Hayafuji
早藤　貴範
Seiji Kawato
川戸　清爾
Yoshio Aoki
芳夫 青木
Shoji Wakayama
若山　昌次
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP6554286A priority Critical patent/JPS6249631A/ja
Publication of JPS6249631A publication Critical patent/JPS6249631A/ja
Publication of JPH0351295B2 publication Critical patent/JPH0351295B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP6554286A 1986-03-24 1986-03-24 半導体装置の製造方法 Granted JPS6249631A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6554286A JPS6249631A (ja) 1986-03-24 1986-03-24 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6554286A JPS6249631A (ja) 1986-03-24 1986-03-24 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3784486A Division JPS61198638A (ja) 1986-02-22 1986-02-22 半導体装置

Publications (2)

Publication Number Publication Date
JPS6249631A true JPS6249631A (ja) 1987-03-04
JPH0351295B2 JPH0351295B2 (cs) 1991-08-06

Family

ID=13290006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6554286A Granted JPS6249631A (ja) 1986-03-24 1986-03-24 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6249631A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02281290A (ja) * 1989-03-31 1990-11-16 Samsung Electron Devices Co Ltd プラズマデイスプレーパネルのスキャンライン駆動分離回路及び分離方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF APPLIED PHYSICS=1975 *
SOLID-STATE SCIENCE AND TECHNOLOGY=1975 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02281290A (ja) * 1989-03-31 1990-11-16 Samsung Electron Devices Co Ltd プラズマデイスプレーパネルのスキャンライン駆動分離回路及び分離方法

Also Published As

Publication number Publication date
JPH0351295B2 (cs) 1991-08-06

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