JPH0351295B2 - - Google Patents

Info

Publication number
JPH0351295B2
JPH0351295B2 JP61065542A JP6554286A JPH0351295B2 JP H0351295 B2 JPH0351295 B2 JP H0351295B2 JP 61065542 A JP61065542 A JP 61065542A JP 6554286 A JP6554286 A JP 6554286A JP H0351295 B2 JPH0351295 B2 JP H0351295B2
Authority
JP
Japan
Prior art keywords
atoms
wafer
oxygen concentration
defects
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61065542A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6249631A (ja
Inventor
Takanori Hayafuji
Seiji Kawato
Yoshio Aoki
Shoji Wakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP6554286A priority Critical patent/JPS6249631A/ja
Publication of JPS6249631A publication Critical patent/JPS6249631A/ja
Publication of JPH0351295B2 publication Critical patent/JPH0351295B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP6554286A 1986-03-24 1986-03-24 半導体装置の製造方法 Granted JPS6249631A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6554286A JPS6249631A (ja) 1986-03-24 1986-03-24 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6554286A JPS6249631A (ja) 1986-03-24 1986-03-24 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3784486A Division JPS61198638A (ja) 1986-02-22 1986-02-22 半導体装置

Publications (2)

Publication Number Publication Date
JPS6249631A JPS6249631A (ja) 1987-03-04
JPH0351295B2 true JPH0351295B2 (cs) 1991-08-06

Family

ID=13290006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6554286A Granted JPS6249631A (ja) 1986-03-24 1986-03-24 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6249631A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910008438B1 (ko) * 1989-03-31 1991-10-15 삼성전관 주식회사 플라즈마 디스플레이 패널의 스캔라인 구동 분리방법

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF APPLIED PHYSICS=1975 *
SOLID-STATE SCIENCE AND TECHNOLOGY=1975 *

Also Published As

Publication number Publication date
JPS6249631A (ja) 1987-03-04

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