JPS6248898B2 - - Google Patents
Info
- Publication number
- JPS6248898B2 JPS6248898B2 JP818381A JP818381A JPS6248898B2 JP S6248898 B2 JPS6248898 B2 JP S6248898B2 JP 818381 A JP818381 A JP 818381A JP 818381 A JP818381 A JP 818381A JP S6248898 B2 JPS6248898 B2 JP S6248898B2
- Authority
- JP
- Japan
- Prior art keywords
- forming
- metal film
- insulating film
- growth
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP818381A JPS57121253A (en) | 1981-01-21 | 1981-01-21 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP818381A JPS57121253A (en) | 1981-01-21 | 1981-01-21 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57121253A JPS57121253A (en) | 1982-07-28 |
| JPS6248898B2 true JPS6248898B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-10-16 |
Family
ID=11686184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP818381A Granted JPS57121253A (en) | 1981-01-21 | 1981-01-21 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57121253A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6054455A (ja) * | 1983-09-05 | 1985-03-28 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
| JPH0612792B2 (ja) * | 1987-03-10 | 1994-02-16 | 日本電気株式会社 | 半導体装置の配線構造 |
-
1981
- 1981-01-21 JP JP818381A patent/JPS57121253A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57121253A (en) | 1982-07-28 |
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