JPS6246277Y2 - - Google Patents
Info
- Publication number
- JPS6246277Y2 JPS6246277Y2 JP1981186248U JP18624881U JPS6246277Y2 JP S6246277 Y2 JPS6246277 Y2 JP S6246277Y2 JP 1981186248 U JP1981186248 U JP 1981186248U JP 18624881 U JP18624881 U JP 18624881U JP S6246277 Y2 JPS6246277 Y2 JP S6246277Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- electrode
- electrostatic bonding
- pressure transducer
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 29
- 239000004065 semiconductor Substances 0.000 claims description 17
- 238000009826 distribution Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000007784 solid electrolyte Substances 0.000 claims description 2
- 230000000452 restraining effect Effects 0.000 claims 2
- 239000011810 insulating material Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 description 5
- 238000001465 metallisation Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 238000009827 uniform distribution Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18624881U JPS5892746U (ja) | 1981-12-16 | 1981-12-16 | 半導体圧力変換器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18624881U JPS5892746U (ja) | 1981-12-16 | 1981-12-16 | 半導体圧力変換器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5892746U JPS5892746U (ja) | 1983-06-23 |
| JPS6246277Y2 true JPS6246277Y2 (fr) | 1987-12-12 |
Family
ID=29988026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18624881U Granted JPS5892746U (ja) | 1981-12-16 | 1981-12-16 | 半導体圧力変換器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5892746U (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0636427B2 (ja) * | 1983-02-04 | 1994-05-11 | 株式会社東芝 | 半導体圧力変換装置 |
| JP2013002942A (ja) * | 2011-06-16 | 2013-01-07 | Honda Motor Co Ltd | 力覚センサチップ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54131892A (en) * | 1978-04-05 | 1979-10-13 | Hitachi Ltd | Semiconductor pressure converter |
-
1981
- 1981-12-16 JP JP18624881U patent/JPS5892746U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54131892A (en) * | 1978-04-05 | 1979-10-13 | Hitachi Ltd | Semiconductor pressure converter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5892746U (ja) | 1983-06-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6313356B2 (fr) | ||
| JPH0263300B2 (fr) | ||
| JP3428729B2 (ja) | 容量式圧力変換器 | |
| JPS6246277Y2 (fr) | ||
| JPH07112939B2 (ja) | シリコンウエハとガラス基板の陽極接合法 | |
| US3315136A (en) | Encapsulated semiconductor device | |
| JP4396009B2 (ja) | 集積化センサ | |
| JPS58103633A (ja) | 半導体圧力変換器 | |
| JP2623909B2 (ja) | 半導体感圧素子 | |
| JPS58103632A (ja) | 半導体圧力変換器 | |
| JPH0628318B2 (ja) | 半導体圧力変換器及びその製造方法 | |
| JPS5854676A (ja) | 半導体圧力変換器 | |
| JPH0276237A (ja) | シリコンウェハとガラス基板の陽極接合法 | |
| JP3156681B2 (ja) | 半導体歪みセンサ | |
| JPS6170746A (ja) | 半導体装置 | |
| JPS629721Y2 (fr) | ||
| JPS6338265A (ja) | 陽極接合方法 | |
| JPS58102567A (ja) | 半導体圧力変換器 | |
| JPH04114474A (ja) | 半導体素子 | |
| JPS58103635A (ja) | 半導体圧力変換器 | |
| JP3102201B2 (ja) | 平形半導体装置 | |
| JPH05218397A (ja) | 圧接型半導体素子 | |
| JPS62260371A (ja) | 半導体圧力センサの製造方法 | |
| JP2000193548A (ja) | 半導体圧力センサ及びその製造方法 | |
| JPS6258648A (ja) | 半導体装置 |