JPS6244450Y2 - - Google Patents
Info
- Publication number
- JPS6244450Y2 JPS6244450Y2 JP4578881U JP4578881U JPS6244450Y2 JP S6244450 Y2 JPS6244450 Y2 JP S6244450Y2 JP 4578881 U JP4578881 U JP 4578881U JP 4578881 U JP4578881 U JP 4578881U JP S6244450 Y2 JPS6244450 Y2 JP S6244450Y2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- exhaust pipe
- mirror
- cryopump
- mirror body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 description 7
- 239000001307 helium Substances 0.000 description 6
- 229910052734 helium Inorganic materials 0.000 description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010913 used oil Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4578881U JPS6244450Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-03-31 | 1981-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4578881U JPS6244450Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-03-31 | 1981-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57158163U JPS57158163U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-10-04 |
| JPS6244450Y2 true JPS6244450Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-24 |
Family
ID=29842664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4578881U Expired JPS6244450Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-03-31 | 1981-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244450Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1981
- 1981-03-31 JP JP4578881U patent/JPS6244450Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57158163U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-10-04 |