JPS6244381B2 - - Google Patents

Info

Publication number
JPS6244381B2
JPS6244381B2 JP54063065A JP6306579A JPS6244381B2 JP S6244381 B2 JPS6244381 B2 JP S6244381B2 JP 54063065 A JP54063065 A JP 54063065A JP 6306579 A JP6306579 A JP 6306579A JP S6244381 B2 JPS6244381 B2 JP S6244381B2
Authority
JP
Japan
Prior art keywords
electron gun
electron
sample
high voltage
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54063065A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55155454A (en
Inventor
Shuichi Saito
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP6306579A priority Critical patent/JPS55155454A/ja
Publication of JPS55155454A publication Critical patent/JPS55155454A/ja
Publication of JPS6244381B2 publication Critical patent/JPS6244381B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP6306579A 1979-05-22 1979-05-22 Scanning electron microscope equipped with electromagnetic radiation type electron gun Granted JPS55155454A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6306579A JPS55155454A (en) 1979-05-22 1979-05-22 Scanning electron microscope equipped with electromagnetic radiation type electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6306579A JPS55155454A (en) 1979-05-22 1979-05-22 Scanning electron microscope equipped with electromagnetic radiation type electron gun

Publications (2)

Publication Number Publication Date
JPS55155454A JPS55155454A (en) 1980-12-03
JPS6244381B2 true JPS6244381B2 (enrdf_load_stackoverflow) 1987-09-19

Family

ID=13218561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6306579A Granted JPS55155454A (en) 1979-05-22 1979-05-22 Scanning electron microscope equipped with electromagnetic radiation type electron gun

Country Status (1)

Country Link
JP (1) JPS55155454A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2738686B2 (ja) * 1987-08-07 1998-04-08 株式会社日立製作所 検査装置およびそれを用いた検査方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849374A (enrdf_load_stackoverflow) * 1971-10-22 1973-07-12
JPS581505B2 (ja) * 1974-01-11 1983-01-11 株式会社日立製作所 デンカイホウシヤデンシジユウ

Also Published As

Publication number Publication date
JPS55155454A (en) 1980-12-03

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