JPS6242243U - - Google Patents
Info
- Publication number
- JPS6242243U JPS6242243U JP13474285U JP13474285U JPS6242243U JP S6242243 U JPS6242243 U JP S6242243U JP 13474285 U JP13474285 U JP 13474285U JP 13474285 U JP13474285 U JP 13474285U JP S6242243 U JPS6242243 U JP S6242243U
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- base electrode
- insulating oxide
- multilayer wiring
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011229 interlayer Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
Description
第１図はこの考案の第一の実施例を示す断面図
、第２図ａ〜ｇはその作成プロセスを工程順に示
す断面図、第３図はこの考案の第二の実施例を示
す断面図、第４図ａ〜ｇはその作成プロセスを工
程順に示す断面図、第５図は従来例を示す断面図
である。
５……基板、６……下地電極、７……絶縁酸化
物膜、９……層間絶縁膜、１１……上部電極、１
２ｂ……下地電極。
Figure 1 is a sectional view showing the first embodiment of this invention, Figures 2 a to g are sectional views showing the manufacturing process in order of steps, and Figure 3 is a sectional view showing the second embodiment of this invention. , FIGS. 4a to 4g are cross-sectional views showing the manufacturing process in the order of steps, and FIG. 5 is a cross-sectional view showing a conventional example. 5... Substrate, 6... Base electrode, 7... Insulating oxide film, 9... Interlayer insulating film, 11... Upper electrode, 1
2b... Base electrode.
Claims (1)
部電極とを有する多層配線デバイスにおいて、前
記下地電極をＡｌ、Ｔｉ又はＴａの金属材料によ
り形成し、この下地電極上に上部電極に対するコ
ンタクトホール部を除いて絶縁酸化物膜を形成し
、この絶縁酸化物膜上に層間絶縁膜を形成したこ
とを特徴とする多層配線デバイス。 In a multilayer wiring device having at least a base electrode, an interlayer insulating film, and an upper electrode on a substrate, the base electrode is formed of a metal material such as Al, Ti, or Ta, and a contact hole portion for the upper electrode is formed on the base electrode. 1. A multilayer wiring device characterized in that an insulating oxide film is formed using the insulating oxide film, and an interlayer insulating film is formed on the insulating oxide film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13474285U JPS6242243U (en) | 1985-09-03 | 1985-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13474285U JPS6242243U (en) | 1985-09-03 | 1985-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6242243U true JPS6242243U (en) | 1987-03-13 |
Family
ID=31036267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13474285U Pending JPS6242243U (en) | 1985-09-03 | 1985-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6242243U (en) |
-
1985
- 1985-09-03 JP JP13474285U patent/JPS6242243U/ja active Pending