JPH0322224U - - Google Patents
Info
- Publication number
- JPH0322224U JPH0322224U JP8273289U JP8273289U JPH0322224U JP H0322224 U JPH0322224 U JP H0322224U JP 8273289 U JP8273289 U JP 8273289U JP 8273289 U JP8273289 U JP 8273289U JP H0322224 U JPH0322224 U JP H0322224U
- Authority
- JP
- Japan
- Prior art keywords
- lower metal
- insulator
- resistance element
- nonlinear resistance
- support substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 229910000676 Si alloy Inorganic materials 0.000 claims 1
- 229910001362 Ta alloys Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Description
第１図ａ〜ｄは本考案の非線形抵抗素子の構造
を形成するための製造方法を工程順に示す断面図
、第２図は本考案の非線形抵抗素子の構造を示す
平面図、第３図は本考案の非線形抵抗素子の電流
−電圧特性を表わすグラフ、第４図は従来例にお
ける非線形抵抗素子の構造を示し、第４図ａは平
面図、第４図ｂは断面図、第５図は従来例におけ
る非線形抵抗素子の電流−電圧特性を表わすグラ
フである。
７…支持基板、８…下層金属、９…絶縁体、１
０…透明導電体。
Figures 1 a to d are cross-sectional views showing the manufacturing method for forming the structure of the nonlinear resistance element of the present invention in order of steps, Figure 2 is a plan view showing the structure of the nonlinear resistance element of the present invention, and Figure 3 is a A graph showing the current-voltage characteristics of the nonlinear resistance element of the present invention, FIG. 4 shows the structure of a conventional nonlinear resistance element, FIG. 4a is a plan view, FIG. 4b is a cross-sectional view, and FIG. It is a graph showing the current-voltage characteristics of a nonlinear resistance element in a conventional example. 7... Support substrate, 8... Lower layer metal, 9... Insulator, 1
0...Transparent conductor.
Claims (1)
属、あるいは下層金属−絶縁体−透明導電体の３
層構造からなる非線形抵抗素子において、前記下
層金属はタンタルとシリコンとの合金で構成する
ことを特徴とする非線形抵抗素子。 Three layers: lower metal - insulator - upper metal, or lower metal - insulator - transparent conductor, provided on the support substrate.
1. A nonlinear resistance element having a layered structure, wherein the lower metal layer is made of an alloy of tantalum and silicon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8273289U JPH0322224U (en) | 1989-07-14 | 1989-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8273289U JPH0322224U (en) | 1989-07-14 | 1989-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0322224U true JPH0322224U (en) | 1991-03-07 |
Family
ID=31629802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8273289U Pending JPH0322224U (en) | 1989-07-14 | 1989-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322224U (en) |
-
1989
- 1989-07-14 JP JP8273289U patent/JPH0322224U/ja active Pending