JPS6238282B2 - - Google Patents

Info

Publication number
JPS6238282B2
JPS6238282B2 JP57139206A JP13920682A JPS6238282B2 JP S6238282 B2 JPS6238282 B2 JP S6238282B2 JP 57139206 A JP57139206 A JP 57139206A JP 13920682 A JP13920682 A JP 13920682A JP S6238282 B2 JPS6238282 B2 JP S6238282B2
Authority
JP
Japan
Prior art keywords
monosilane
type
zeolite
arsine
phosphine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57139206A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5930711A (ja
Inventor
Keiji Kawasaki
Shoichi Tazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP13920682A priority Critical patent/JPS5930711A/ja
Publication of JPS5930711A publication Critical patent/JPS5930711A/ja
Publication of JPS6238282B2 publication Critical patent/JPS6238282B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Silicon Compounds (AREA)
  • Silicates, Zeolites, And Molecular Sieves (AREA)
JP13920682A 1982-08-12 1982-08-12 モノシランの精製法 Granted JPS5930711A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13920682A JPS5930711A (ja) 1982-08-12 1982-08-12 モノシランの精製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13920682A JPS5930711A (ja) 1982-08-12 1982-08-12 モノシランの精製法

Publications (2)

Publication Number Publication Date
JPS5930711A JPS5930711A (ja) 1984-02-18
JPS6238282B2 true JPS6238282B2 (enrdf_load_stackoverflow) 1987-08-17

Family

ID=15240012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13920682A Granted JPS5930711A (ja) 1982-08-12 1982-08-12 モノシランの精製法

Country Status (1)

Country Link
JP (1) JPS5930711A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4772296A (en) * 1987-05-12 1988-09-20 Eagle-Picher Industries, Inc. Method of purifying and depositing group IIIa and group Va compounds to produce epitaxial films
FR2622564B1 (fr) * 1987-10-28 1990-02-02 Rhone Poulenc Chimie Procede de purification de silane
FR2652346B1 (fr) * 1989-09-22 1991-11-29 Air Liquide Procede de preparation de disilane.
US5840953A (en) * 1995-11-16 1998-11-24 Eagle-Picher Industries, Inc. Purified tetraethoxysilane and method of purifying
CN1297478C (zh) * 2003-11-28 2007-01-31 上海家化联合股份有限公司 分子筛基纳米复合抗紫外材料、其制备方法和用途

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841439A (enrdf_load_stackoverflow) * 1971-10-01 1973-06-18

Also Published As

Publication number Publication date
JPS5930711A (ja) 1984-02-18

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