JPS6237927U - - Google Patents

Info

Publication number
JPS6237927U
JPS6237927U JP12953785U JP12953785U JPS6237927U JP S6237927 U JPS6237927 U JP S6237927U JP 12953785 U JP12953785 U JP 12953785U JP 12953785 U JP12953785 U JP 12953785U JP S6237927 U JPS6237927 U JP S6237927U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
quartz
supported
heat treatment
treatment apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12953785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12953785U priority Critical patent/JPS6237927U/ja
Publication of JPS6237927U publication Critical patent/JPS6237927U/ja
Pending legal-status Critical Current

Links

JP12953785U 1985-08-27 1985-08-27 Pending JPS6237927U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12953785U JPS6237927U (enrdf_load_stackoverflow) 1985-08-27 1985-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12953785U JPS6237927U (enrdf_load_stackoverflow) 1985-08-27 1985-08-27

Publications (1)

Publication Number Publication Date
JPS6237927U true JPS6237927U (enrdf_load_stackoverflow) 1987-03-06

Family

ID=31026192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12953785U Pending JPS6237927U (enrdf_load_stackoverflow) 1985-08-27 1985-08-27

Country Status (1)

Country Link
JP (1) JPS6237927U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007519232A (ja) * 2003-12-19 2007-07-12 マトソン テクノロジー カナダ インコーポレイテッド 工作物の熱誘起運動を抑制する機器及び装置
JP2013030772A (ja) * 2003-12-19 2013-02-07 Mattson Technology Canada Inc 工作物の熱誘起運動を抑制する機器及び装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61129834A (ja) * 1984-11-28 1986-06-17 Dainippon Screen Mfg Co Ltd 光照射型熱処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61129834A (ja) * 1984-11-28 1986-06-17 Dainippon Screen Mfg Co Ltd 光照射型熱処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007519232A (ja) * 2003-12-19 2007-07-12 マトソン テクノロジー カナダ インコーポレイテッド 工作物の熱誘起運動を抑制する機器及び装置
JP2013030772A (ja) * 2003-12-19 2013-02-07 Mattson Technology Canada Inc 工作物の熱誘起運動を抑制する機器及び装置

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