JPH0356045Y2 - - Google Patents
Info
- Publication number
- JPH0356045Y2 JPH0356045Y2 JP15137483U JP15137483U JPH0356045Y2 JP H0356045 Y2 JPH0356045 Y2 JP H0356045Y2 JP 15137483 U JP15137483 U JP 15137483U JP 15137483 U JP15137483 U JP 15137483U JP H0356045 Y2 JPH0356045 Y2 JP H0356045Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- mirror
- light emitting
- ultraviolet
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000003504 photosensitizing agent Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15137483U JPS6061721U (ja) | 1983-10-01 | 1983-10-01 | 紫外線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15137483U JPS6061721U (ja) | 1983-10-01 | 1983-10-01 | 紫外線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6061721U JPS6061721U (ja) | 1985-04-30 |
| JPH0356045Y2 true JPH0356045Y2 (enrdf_load_stackoverflow) | 1991-12-16 |
Family
ID=30335462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15137483U Granted JPS6061721U (ja) | 1983-10-01 | 1983-10-01 | 紫外線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6061721U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2564538B2 (ja) * | 1987-03-27 | 1996-12-18 | 株式会社 半導体エネルギ−研究所 | 半導体処理装置 |
-
1983
- 1983-10-01 JP JP15137483U patent/JPS6061721U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6061721U (ja) | 1985-04-30 |
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