JPS6236430A - 真空連続処理装置 - Google Patents

真空連続処理装置

Info

Publication number
JPS6236430A
JPS6236430A JP17587085A JP17587085A JPS6236430A JP S6236430 A JPS6236430 A JP S6236430A JP 17587085 A JP17587085 A JP 17587085A JP 17587085 A JP17587085 A JP 17587085A JP S6236430 A JPS6236430 A JP S6236430A
Authority
JP
Japan
Prior art keywords
seal roll
vacuum
seal
side piece
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17587085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545615B2 (enrdf_load_stackoverflow
Inventor
Masaya Tokai
東海　正家
Yoshitada Hata
畑　慶忠
Kenichi Kato
健一 加藤
Susumu Ueno
進 上野
Koichi Kuroda
黒田　幸一
Hajime Kitamura
肇 北村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP17587085A priority Critical patent/JPS6236430A/ja
Publication of JPS6236430A publication Critical patent/JPS6236430A/ja
Publication of JPH0545615B2 publication Critical patent/JPH0545615B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/02—Feed or outlet devices therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Vapour Deposition (AREA)
JP17587085A 1985-08-12 1985-08-12 真空連続処理装置 Granted JPS6236430A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17587085A JPS6236430A (ja) 1985-08-12 1985-08-12 真空連続処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17587085A JPS6236430A (ja) 1985-08-12 1985-08-12 真空連続処理装置

Publications (2)

Publication Number Publication Date
JPS6236430A true JPS6236430A (ja) 1987-02-17
JPH0545615B2 JPH0545615B2 (enrdf_load_stackoverflow) 1993-07-09

Family

ID=16003645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17587085A Granted JPS6236430A (ja) 1985-08-12 1985-08-12 真空連続処理装置

Country Status (1)

Country Link
JP (1) JPS6236430A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0545615B2 (enrdf_load_stackoverflow) 1993-07-09

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