JPS623578B2 - - Google Patents

Info

Publication number
JPS623578B2
JPS623578B2 JP58156260A JP15626083A JPS623578B2 JP S623578 B2 JPS623578 B2 JP S623578B2 JP 58156260 A JP58156260 A JP 58156260A JP 15626083 A JP15626083 A JP 15626083A JP S623578 B2 JPS623578 B2 JP S623578B2
Authority
JP
Japan
Prior art keywords
pattern
patterns
partial
standard
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58156260A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5981769A (ja
Inventor
Michihiro Mese
Seiji Kashioka
Masakazu Ejiri
Takafumi Myatake
Isamu Yamazaki
Toshimitsu Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58156260A priority Critical patent/JPS5981769A/ja
Publication of JPS5981769A publication Critical patent/JPS5981769A/ja
Publication of JPS623578B2 publication Critical patent/JPS623578B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/1015—Shape
    • H01L2924/1016—Shape being a cuboid
    • H01L2924/10162—Shape being a cuboid with a square active surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP58156260A 1983-08-29 1983-08-29 位置検出装置 Granted JPS5981769A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58156260A JPS5981769A (ja) 1983-08-29 1983-08-29 位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58156260A JPS5981769A (ja) 1983-08-29 1983-08-29 位置検出装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5651976A Division JPS52140278A (en) 1976-05-19 1976-05-19 Position detector

Publications (2)

Publication Number Publication Date
JPS5981769A JPS5981769A (ja) 1984-05-11
JPS623578B2 true JPS623578B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-26

Family

ID=15623906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58156260A Granted JPS5981769A (ja) 1983-08-29 1983-08-29 位置検出装置

Country Status (1)

Country Link
JP (1) JPS5981769A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5981769A (ja) 1984-05-11

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