JPS6235642A - 半導体素子の製造方法 - Google Patents

半導体素子の製造方法

Info

Publication number
JPS6235642A
JPS6235642A JP60175552A JP17555285A JPS6235642A JP S6235642 A JPS6235642 A JP S6235642A JP 60175552 A JP60175552 A JP 60175552A JP 17555285 A JP17555285 A JP 17555285A JP S6235642 A JPS6235642 A JP S6235642A
Authority
JP
Japan
Prior art keywords
etching
groove
semiconductor board
mesa
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60175552A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0424860B2 (enrdf_load_stackoverflow
Inventor
Kenji Suzuki
健司 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP60175552A priority Critical patent/JPS6235642A/ja
Publication of JPS6235642A publication Critical patent/JPS6235642A/ja
Publication of JPH0424860B2 publication Critical patent/JPH0424860B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Dicing (AREA)
JP60175552A 1985-08-09 1985-08-09 半導体素子の製造方法 Granted JPS6235642A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60175552A JPS6235642A (ja) 1985-08-09 1985-08-09 半導体素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60175552A JPS6235642A (ja) 1985-08-09 1985-08-09 半導体素子の製造方法

Publications (2)

Publication Number Publication Date
JPS6235642A true JPS6235642A (ja) 1987-02-16
JPH0424860B2 JPH0424860B2 (enrdf_load_stackoverflow) 1992-04-28

Family

ID=15998074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60175552A Granted JPS6235642A (ja) 1985-08-09 1985-08-09 半導体素子の製造方法

Country Status (1)

Country Link
JP (1) JPS6235642A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5593815A (en) * 1989-07-31 1997-01-14 Goldstar Co., Ltd. Cleaving process in manufacturing a semiconductor laser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5593815A (en) * 1989-07-31 1997-01-14 Goldstar Co., Ltd. Cleaving process in manufacturing a semiconductor laser

Also Published As

Publication number Publication date
JPH0424860B2 (enrdf_load_stackoverflow) 1992-04-28

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