JPS6235641A - 電子ビーム照射方法 - Google Patents

電子ビーム照射方法

Info

Publication number
JPS6235641A
JPS6235641A JP60176191A JP17619185A JPS6235641A JP S6235641 A JPS6235641 A JP S6235641A JP 60176191 A JP60176191 A JP 60176191A JP 17619185 A JP17619185 A JP 17619185A JP S6235641 A JPS6235641 A JP S6235641A
Authority
JP
Japan
Prior art keywords
electron beam
chip
specimen
sample
indexes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60176191A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525178B2 (enExample
Inventor
Tetsuya Riyou
哲也 椋
Joji Serizawa
芹沢　譲二
Kazuo Yagi
一夫 八木
Hiroyuki Tate
浩之 舘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60176191A priority Critical patent/JPS6235641A/ja
Publication of JPS6235641A publication Critical patent/JPS6235641A/ja
Publication of JPH0525178B2 publication Critical patent/JPH0525178B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60176191A 1985-08-09 1985-08-09 電子ビーム照射方法 Granted JPS6235641A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60176191A JPS6235641A (ja) 1985-08-09 1985-08-09 電子ビーム照射方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60176191A JPS6235641A (ja) 1985-08-09 1985-08-09 電子ビーム照射方法

Publications (2)

Publication Number Publication Date
JPS6235641A true JPS6235641A (ja) 1987-02-16
JPH0525178B2 JPH0525178B2 (enExample) 1993-04-12

Family

ID=16009231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60176191A Granted JPS6235641A (ja) 1985-08-09 1985-08-09 電子ビーム照射方法

Country Status (1)

Country Link
JP (1) JPS6235641A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017157692A (ja) * 2016-03-02 2017-09-07 株式会社Ｓｃｒｅｅｎホールディングス 検査装置及び検査方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54144863A (en) * 1978-05-02 1979-11-12 Siemens Ag Scan electron microscope
JPS5715434A (en) * 1980-06-30 1982-01-26 Mitsubishi Electric Corp Bonding apparatus
JPS5969305A (ja) * 1982-10-13 1984-04-19 Hitachi Ltd 搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54144863A (en) * 1978-05-02 1979-11-12 Siemens Ag Scan electron microscope
JPS5715434A (en) * 1980-06-30 1982-01-26 Mitsubishi Electric Corp Bonding apparatus
JPS5969305A (ja) * 1982-10-13 1984-04-19 Hitachi Ltd 搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017157692A (ja) * 2016-03-02 2017-09-07 株式会社Ｓｃｒｅｅｎホールディングス 検査装置及び検査方法

Also Published As

Publication number Publication date
JPH0525178B2 (enExample) 1993-04-12

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