JPS6444034A - Inspecting device - Google Patents
Inspecting deviceInfo
- Publication number
- JPS6444034A JPS6444034A JP62199719A JP19971987A JPS6444034A JP S6444034 A JPS6444034 A JP S6444034A JP 62199719 A JP62199719 A JP 62199719A JP 19971987 A JP19971987 A JP 19971987A JP S6444034 A JPS6444034 A JP S6444034A
- Authority
- JP
- Japan
- Prior art keywords
- optimum
- surface state
- inspecting
- throughput
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To improve the reliability and yield of products and to improve the throughput of a manufacturing line by providing a data storage part for filing various parameters, and an operation input unit for automatically setting an optimum parameter by designating a file name corresponding to the surface state of a sample at the time of inspecting. CONSTITUTION:Optimum illuminating conditions corresponding to the surface state of a wafer, i.e., a surface material and surface shape, etc., are field in the format of parameters for forming the conditions in a data storage part 14, an optimum file for the surface state of the wafer to be inspected is drawn from an operation input unit 16 at the time of inspecting, and an electron beam is scanned by the optimum parameter in the film. Thus, the optimum inspection is rapidly performed. As a result, the reliability and yield of a semiconductor device are improved, and the throughput of a manufacturing line of the device is improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62199719A JP2633861B2 (en) | 1987-08-12 | 1987-08-12 | SEM type inspection equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62199719A JP2633861B2 (en) | 1987-08-12 | 1987-08-12 | SEM type inspection equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6444034A true JPS6444034A (en) | 1989-02-16 |
JP2633861B2 JP2633861B2 (en) | 1997-07-23 |
Family
ID=16412474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62199719A Expired - Lifetime JP2633861B2 (en) | 1987-08-12 | 1987-08-12 | SEM type inspection equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2633861B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005326206A (en) * | 2004-05-13 | 2005-11-24 | Jeol Ltd | Analyzing condition sheet, analyzing condition recording medium and sample analyzer |
CN112763432A (en) * | 2020-12-25 | 2021-05-07 | 中国科学院上海高等研究院 | Control method for automatically collecting absorption spectrum experimental data |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61104553A (en) * | 1984-10-26 | 1986-05-22 | Hitachi Ltd | Electron microscope |
-
1987
- 1987-08-12 JP JP62199719A patent/JP2633861B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61104553A (en) * | 1984-10-26 | 1986-05-22 | Hitachi Ltd | Electron microscope |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005326206A (en) * | 2004-05-13 | 2005-11-24 | Jeol Ltd | Analyzing condition sheet, analyzing condition recording medium and sample analyzer |
CN112763432A (en) * | 2020-12-25 | 2021-05-07 | 中国科学院上海高等研究院 | Control method for automatically collecting absorption spectrum experimental data |
Also Published As
Publication number | Publication date |
---|---|
JP2633861B2 (en) | 1997-07-23 |
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