JPS52104862A - Scanning electronic microscope - Google Patents

Scanning electronic microscope

Info

Publication number
JPS52104862A
JPS52104862A JP2109876A JP2109876A JPS52104862A JP S52104862 A JPS52104862 A JP S52104862A JP 2109876 A JP2109876 A JP 2109876A JP 2109876 A JP2109876 A JP 2109876A JP S52104862 A JPS52104862 A JP S52104862A
Authority
JP
Japan
Prior art keywords
electronic microscope
scanning electronic
vacuum
concept
lowdegree
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2109876A
Other languages
Japanese (ja)
Inventor
Tadao Watabe
Yoshiharu Uchiumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2109876A priority Critical patent/JPS52104862A/en
Publication of JPS52104862A publication Critical patent/JPS52104862A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a scanning electronic microscope based on a concept of a lowdegree vacuum as a condition of spatter-coating which enables of vacuum at the same process as one under the same degree of vacuum at the time of sample preexhaust as the above-mentioned concept.
JP2109876A 1976-03-01 1976-03-01 Scanning electronic microscope Pending JPS52104862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2109876A JPS52104862A (en) 1976-03-01 1976-03-01 Scanning electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2109876A JPS52104862A (en) 1976-03-01 1976-03-01 Scanning electronic microscope

Publications (1)

Publication Number Publication Date
JPS52104862A true JPS52104862A (en) 1977-09-02

Family

ID=12045383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2109876A Pending JPS52104862A (en) 1976-03-01 1976-03-01 Scanning electronic microscope

Country Status (1)

Country Link
JP (1) JPS52104862A (en)

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