JPS5219184A - Vapor source - Google Patents
Vapor sourceInfo
- Publication number
- JPS5219184A JPS5219184A JP9646175A JP9646175A JPS5219184A JP S5219184 A JPS5219184 A JP S5219184A JP 9646175 A JP9646175 A JP 9646175A JP 9646175 A JP9646175 A JP 9646175A JP S5219184 A JPS5219184 A JP S5219184A
- Authority
- JP
- Japan
- Prior art keywords
- vapor source
- vapor
- molecular
- source capable
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/221—Ion beam deposition
Abstract
PURPOSE:A vapor source capable of obtaining atom-or molecular-form vapor particles.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9646175A JPS5219184A (en) | 1975-08-06 | 1975-08-06 | Vapor source |
GB4345975A GB1483966A (en) | 1974-10-23 | 1975-10-22 | Vapourized-metal cluster ion source and ionized-cluster beam deposition |
DE2547552A DE2547552B2 (en) | 1974-10-23 | 1975-10-23 | Layer vapor deposition process and equipment |
US05/625,041 US4152478A (en) | 1974-10-23 | 1975-10-23 | Ionized-cluster deposited on a substrate and method of depositing ionized cluster on a substrate |
US06/011,917 US4217855A (en) | 1974-10-23 | 1979-02-13 | Vaporized-metal cluster ion source and ionized-cluster beam deposition device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9646175A JPS5219184A (en) | 1975-08-06 | 1975-08-06 | Vapor source |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5219184A true JPS5219184A (en) | 1977-02-14 |
JPS5750874B2 JPS5750874B2 (en) | 1982-10-29 |
Family
ID=14165658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9646175A Granted JPS5219184A (en) | 1974-10-23 | 1975-08-06 | Vapor source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5219184A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4599727B2 (en) * | 2001-02-21 | 2010-12-15 | 株式会社デンソー | Vapor deposition equipment |
JP2013519787A (en) * | 2010-02-16 | 2013-05-30 | アストロン フィアム セーフティー | Heating system for vapor deposition sources |
-
1975
- 1975-08-06 JP JP9646175A patent/JPS5219184A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4599727B2 (en) * | 2001-02-21 | 2010-12-15 | 株式会社デンソー | Vapor deposition equipment |
JP2013519787A (en) * | 2010-02-16 | 2013-05-30 | アストロン フィアム セーフティー | Heating system for vapor deposition sources |
Also Published As
Publication number | Publication date |
---|---|
JPS5750874B2 (en) | 1982-10-29 |
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