JPS6235221B2 - - Google Patents
Info
- Publication number
- JPS6235221B2 JPS6235221B2 JP13370478A JP13370478A JPS6235221B2 JP S6235221 B2 JPS6235221 B2 JP S6235221B2 JP 13370478 A JP13370478 A JP 13370478A JP 13370478 A JP13370478 A JP 13370478A JP S6235221 B2 JPS6235221 B2 JP S6235221B2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- arrow
- laser beam
- conductive film
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000010408 film Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13370478A JPS5562645A (en) | 1978-11-01 | 1978-11-01 | Manufacturing apparatus of electron radiation deflection electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13370478A JPS5562645A (en) | 1978-11-01 | 1978-11-01 | Manufacturing apparatus of electron radiation deflection electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5562645A JPS5562645A (en) | 1980-05-12 |
| JPS6235221B2 true JPS6235221B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-31 |
Family
ID=15110931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13370478A Granted JPS5562645A (en) | 1978-11-01 | 1978-11-01 | Manufacturing apparatus of electron radiation deflection electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5562645A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1978
- 1978-11-01 JP JP13370478A patent/JPS5562645A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5562645A (en) | 1980-05-12 |
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