JPS5562645A - Manufacturing apparatus of electron radiation deflection electrode - Google Patents

Manufacturing apparatus of electron radiation deflection electrode

Info

Publication number
JPS5562645A
JPS5562645A JP13370478A JP13370478A JPS5562645A JP S5562645 A JPS5562645 A JP S5562645A JP 13370478 A JP13370478 A JP 13370478A JP 13370478 A JP13370478 A JP 13370478A JP S5562645 A JPS5562645 A JP S5562645A
Authority
JP
Japan
Prior art keywords
beams
mirror
high speed
arrow
scans
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13370478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6235221B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hiroshi Yamaguchi
Takeoki Miyauchi
Masao Mitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13370478A priority Critical patent/JPS5562645A/ja
Publication of JPS5562645A publication Critical patent/JPS5562645A/ja
Publication of JPS6235221B2 publication Critical patent/JPS6235221B2/ja
Granted legal-status Critical Current

Links

JP13370478A 1978-11-01 1978-11-01 Manufacturing apparatus of electron radiation deflection electrode Granted JPS5562645A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13370478A JPS5562645A (en) 1978-11-01 1978-11-01 Manufacturing apparatus of electron radiation deflection electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13370478A JPS5562645A (en) 1978-11-01 1978-11-01 Manufacturing apparatus of electron radiation deflection electrode

Publications (2)

Publication Number Publication Date
JPS5562645A true JPS5562645A (en) 1980-05-12
JPS6235221B2 JPS6235221B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-07-31

Family

ID=15110931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13370478A Granted JPS5562645A (en) 1978-11-01 1978-11-01 Manufacturing apparatus of electron radiation deflection electrode

Country Status (1)

Country Link
JP (1) JPS5562645A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6235221B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-07-31

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