JPS6233016Y2 - - Google Patents

Info

Publication number
JPS6233016Y2
JPS6233016Y2 JP1982030612U JP3061282U JPS6233016Y2 JP S6233016 Y2 JPS6233016 Y2 JP S6233016Y2 JP 1982030612 U JP1982030612 U JP 1982030612U JP 3061282 U JP3061282 U JP 3061282U JP S6233016 Y2 JPS6233016 Y2 JP S6233016Y2
Authority
JP
Japan
Prior art keywords
etching
liquid
solution
tank
seal block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982030612U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58135465U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3061282U priority Critical patent/JPS58135465U/ja
Publication of JPS58135465U publication Critical patent/JPS58135465U/ja
Application granted granted Critical
Publication of JPS6233016Y2 publication Critical patent/JPS6233016Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP3061282U 1982-03-03 1982-03-03 表面処理装置 Granted JPS58135465U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3061282U JPS58135465U (ja) 1982-03-03 1982-03-03 表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3061282U JPS58135465U (ja) 1982-03-03 1982-03-03 表面処理装置

Publications (2)

Publication Number Publication Date
JPS58135465U JPS58135465U (ja) 1983-09-12
JPS6233016Y2 true JPS6233016Y2 (cs) 1987-08-24

Family

ID=30042318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3061282U Granted JPS58135465U (ja) 1982-03-03 1982-03-03 表面処理装置

Country Status (1)

Country Link
JP (1) JPS58135465U (cs)

Also Published As

Publication number Publication date
JPS58135465U (ja) 1983-09-12

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