JPS6233016Y2 - - Google Patents
Info
- Publication number
- JPS6233016Y2 JPS6233016Y2 JP1982030612U JP3061282U JPS6233016Y2 JP S6233016 Y2 JPS6233016 Y2 JP S6233016Y2 JP 1982030612 U JP1982030612 U JP 1982030612U JP 3061282 U JP3061282 U JP 3061282U JP S6233016 Y2 JPS6233016 Y2 JP S6233016Y2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- liquid
- solution
- tank
- seal block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000126 substance Substances 0.000 claims description 9
- 238000004381 surface treatment Methods 0.000 claims description 9
- 238000005530 etching Methods 0.000 description 41
- 239000007788 liquid Substances 0.000 description 30
- 239000000243 solution Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 10
- 230000008020 evaporation Effects 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- 238000007667 floating Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003562 lightweight material Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3061282U JPS58135465U (ja) | 1982-03-03 | 1982-03-03 | 表面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3061282U JPS58135465U (ja) | 1982-03-03 | 1982-03-03 | 表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58135465U JPS58135465U (ja) | 1983-09-12 |
| JPS6233016Y2 true JPS6233016Y2 (US20100056889A1-20100304-C00004.png) | 1987-08-24 |
Family
ID=30042318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3061282U Granted JPS58135465U (ja) | 1982-03-03 | 1982-03-03 | 表面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58135465U (US20100056889A1-20100304-C00004.png) |
-
1982
- 1982-03-03 JP JP3061282U patent/JPS58135465U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58135465U (ja) | 1983-09-12 |
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