JPS6231683A - クリ−ンル−ム間の搬送方法 - Google Patents

クリ−ンル−ム間の搬送方法

Info

Publication number
JPS6231683A
JPS6231683A JP16939785A JP16939785A JPS6231683A JP S6231683 A JPS6231683 A JP S6231683A JP 16939785 A JP16939785 A JP 16939785A JP 16939785 A JP16939785 A JP 16939785A JP S6231683 A JPS6231683 A JP S6231683A
Authority
JP
Japan
Prior art keywords
clean
elevating
clean room
opening
hoistway
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16939785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0357018B2 (enrdf_load_stackoverflow
Inventor
上霜　敏宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP16939785A priority Critical patent/JPS6231683A/ja
Publication of JPS6231683A publication Critical patent/JPS6231683A/ja
Publication of JPH0357018B2 publication Critical patent/JPH0357018B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Types And Forms Of Lifts (AREA)
  • Ventilation (AREA)
JP16939785A 1985-07-30 1985-07-30 クリ−ンル−ム間の搬送方法 Granted JPS6231683A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16939785A JPS6231683A (ja) 1985-07-30 1985-07-30 クリ−ンル−ム間の搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16939785A JPS6231683A (ja) 1985-07-30 1985-07-30 クリ−ンル−ム間の搬送方法

Publications (2)

Publication Number Publication Date
JPS6231683A true JPS6231683A (ja) 1987-02-10
JPH0357018B2 JPH0357018B2 (enrdf_load_stackoverflow) 1991-08-29

Family

ID=15885839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16939785A Granted JPS6231683A (ja) 1985-07-30 1985-07-30 クリ−ンル−ム間の搬送方法

Country Status (1)

Country Link
JP (1) JPS6231683A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06263246A (ja) * 1992-01-10 1994-09-20 Tokyo Electron Ltd 処理装置
JP2022056167A (ja) * 2020-09-29 2022-04-08 芝浦メカトロニクス株式会社 送風器及び電子部品の実装装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5546353A (en) * 1978-09-29 1980-04-01 Hitachi Ltd Refrigeration cycle with scroll rolling machine

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5546353A (en) * 1978-09-29 1980-04-01 Hitachi Ltd Refrigeration cycle with scroll rolling machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06263246A (ja) * 1992-01-10 1994-09-20 Tokyo Electron Ltd 処理装置
JP2022056167A (ja) * 2020-09-29 2022-04-08 芝浦メカトロニクス株式会社 送風器及び電子部品の実装装置

Also Published As

Publication number Publication date
JPH0357018B2 (enrdf_load_stackoverflow) 1991-08-29

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term