JPS62297285A - 低温焼成セラミツク配線基板 - Google Patents

Info

Publication number

JPS62297285A

JPS62297285A JP13871586A JP13871586A JPS62297285A JP S62297285 A JPS62297285 A JP S62297285A JP 13871586 A JP13871586 A JP 13871586A JP 13871586 A JP13871586 A JP 13871586A JP S62297285 A JPS62297285 A JP S62297285A

Authority

JP

Japan

Prior art keywords

substrate

coating layer

alumina

ceramic

conductor layer

Prior art date

1986-06-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 239000000758 substrate Substances 0.000 title claims description 42
• 239000000919 ceramic Substances 0.000 title claims description 29
• 239000010410 layer Substances 0.000 claims description 41
• 239000004020 conductor Substances 0.000 claims description 37
• 239000011247 coating layer Substances 0.000 claims description 34
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 30
• 239000011521 glass Substances 0.000 claims description 15
• 238000005524 ceramic coating Methods 0.000 claims description 4
• QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 12
• 239000000203 mixture Substances 0.000 description 11
• 230000000052 comparative effect Effects 0.000 description 9
• 238000010304 firing Methods 0.000 description 8
• 238000002844 melting Methods 0.000 description 7
• 229910052751 metal Inorganic materials 0.000 description 6
• 239000002184 metal Substances 0.000 description 6
• 230000003014 reinforcing effect Effects 0.000 description 6
• NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 5
• 230000008018 melting Effects 0.000 description 5
• 230000007423 decrease Effects 0.000 description 4
• 230000002093 peripheral effect Effects 0.000 description 4
• KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
• YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
• 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
• 230000000694 effects Effects 0.000 description 3
• 238000004898 kneading Methods 0.000 description 3
• 238000005476 soldering Methods 0.000 description 3
• LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
• 239000001856 Ethyl cellulose Substances 0.000 description 2
• ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
• 238000005219 brazing Methods 0.000 description 2
• 229920001249 ethyl cellulose Polymers 0.000 description 2
• 235000019325 ethyl cellulose Nutrition 0.000 description 2
• 229910052737 gold Inorganic materials 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• 150000002739 metals Chemical class 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• 238000000465 moulding Methods 0.000 description 2
• 239000000843 powder Substances 0.000 description 2
• WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 2
• 238000007650 screen-printing Methods 0.000 description 2
• 239000002904 solvent Substances 0.000 description 2
• QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
• 239000004925 Acrylic resin Substances 0.000 description 1
• 229920000178 Acrylic resin Polymers 0.000 description 1
• 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
• 229910052581 Si3N4 Inorganic materials 0.000 description 1
• WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
• 238000005452 bending Methods 0.000 description 1
• 229910052878 cordierite Inorganic materials 0.000 description 1
• 238000005336 cracking Methods 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• 230000001934 delay Effects 0.000 description 1
• SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
• JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
• 229910052839 forsterite Inorganic materials 0.000 description 1
• 239000012535 impurity Substances 0.000 description 1
• 239000004615 ingredient Substances 0.000 description 1
• HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
• 239000011368 organic material Substances 0.000 description 1
• XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
• 230000000704 physical effect Effects 0.000 description 1
• 229910052697 platinum Inorganic materials 0.000 description 1
• 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
• 238000007639 printing Methods 0.000 description 1
• 229920005989 resin Polymers 0.000 description 1
• 239000011347 resin Substances 0.000 description 1
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
• 229910010271 silicon carbide Inorganic materials 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
• 229910052709 silver Inorganic materials 0.000 description 1
• 238000005245 sintering Methods 0.000 description 1
• 229910052596 spinel Inorganic materials 0.000 description 1
• 239000011029 spinel Substances 0.000 description 1
• 229940116411 terpineol Drugs 0.000 description 1
• 229910052721 tungsten Inorganic materials 0.000 description 1
• 238000010792 warming Methods 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Cited By (1)