JPS62295452A - 電極形成方法 - Google Patents

電極形成方法

Info

Publication number
JPS62295452A
JPS62295452A JP61114130A JP11413086A JPS62295452A JP S62295452 A JPS62295452 A JP S62295452A JP 61114130 A JP61114130 A JP 61114130A JP 11413086 A JP11413086 A JP 11413086A JP S62295452 A JPS62295452 A JP S62295452A
Authority
JP
Japan
Prior art keywords
film
molybdenum
titanium
forming
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61114130A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0579188B2 (enExample
Inventor
Kazuo Miyamoto
宮本　和郎
Hideaki Tanno
丹野　英明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP61114130A priority Critical patent/JPS62295452A/ja
Publication of JPS62295452A publication Critical patent/JPS62295452A/ja
Publication of JPH0579188B2 publication Critical patent/JPH0579188B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP61114130A 1986-05-19 1986-05-19 電極形成方法 Granted JPS62295452A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61114130A JPS62295452A (ja) 1986-05-19 1986-05-19 電極形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61114130A JPS62295452A (ja) 1986-05-19 1986-05-19 電極形成方法

Publications (2)

Publication Number Publication Date
JPS62295452A true JPS62295452A (ja) 1987-12-22
JPH0579188B2 JPH0579188B2 (enExample) 1993-11-01

Family

ID=14629886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61114130A Granted JPS62295452A (ja) 1986-05-19 1986-05-19 電極形成方法

Country Status (1)

Country Link
JP (1) JPS62295452A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0373573A (ja) * 1989-08-14 1991-03-28 Sanken Electric Co Ltd シヨットキバリア半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0373573A (ja) * 1989-08-14 1991-03-28 Sanken Electric Co Ltd シヨットキバリア半導体装置

Also Published As

Publication number Publication date
JPH0579188B2 (enExample) 1993-11-01

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term