JPS6229507B2 - - Google Patents

Info

Publication number
JPS6229507B2
JPS6229507B2 JP57135954A JP13595482A JPS6229507B2 JP S6229507 B2 JPS6229507 B2 JP S6229507B2 JP 57135954 A JP57135954 A JP 57135954A JP 13595482 A JP13595482 A JP 13595482A JP S6229507 B2 JPS6229507 B2 JP S6229507B2
Authority
JP
Japan
Prior art keywords
layer
amorphous
vapor deposition
chemical vapor
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57135954A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5925970A (ja
Inventor
Minoru Nakano
Akira Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP13595482A priority Critical patent/JPS5925970A/ja
Publication of JPS5925970A publication Critical patent/JPS5925970A/ja
Publication of JPS6229507B2 publication Critical patent/JPS6229507B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP13595482A 1982-08-03 1982-08-03 被覆超硬合金 Granted JPS5925970A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13595482A JPS5925970A (ja) 1982-08-03 1982-08-03 被覆超硬合金

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13595482A JPS5925970A (ja) 1982-08-03 1982-08-03 被覆超硬合金

Publications (2)

Publication Number Publication Date
JPS5925970A JPS5925970A (ja) 1984-02-10
JPS6229507B2 true JPS6229507B2 (enrdf_load_stackoverflow) 1987-06-26

Family

ID=15163720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13595482A Granted JPS5925970A (ja) 1982-08-03 1982-08-03 被覆超硬合金

Country Status (1)

Country Link
JP (1) JPS5925970A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60177179A (ja) * 1984-02-23 1985-09-11 Toshiba Corp 黒色装飾品
DE4239234A1 (de) * 1992-11-21 1994-06-09 Krupp Widia Gmbh Werkzeug und Verfahren zur Beschichtung eines Werkzeuggrundkörpers
DE19815677C2 (de) * 1998-04-08 2002-02-07 Dresden Ev Inst Festkoerper Verbundkörper und Verfahren zu dessen Herstellung
JP5831704B2 (ja) * 2012-03-06 2015-12-09 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性、耐欠損性を備える表面被覆切削工具
JP5892335B2 (ja) * 2012-07-27 2016-03-23 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を備える表面被覆切削工具

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57135441A (en) * 1981-02-13 1982-08-21 Sony Corp Magnetic recording medium

Also Published As

Publication number Publication date
JPS5925970A (ja) 1984-02-10

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