JPS62292613A - 高純度けい素の精製方法 - Google Patents
高純度けい素の精製方法Info
- Publication number
- JPS62292613A JPS62292613A JP13287486A JP13287486A JPS62292613A JP S62292613 A JPS62292613 A JP S62292613A JP 13287486 A JP13287486 A JP 13287486A JP 13287486 A JP13287486 A JP 13287486A JP S62292613 A JPS62292613 A JP S62292613A
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- carbon
- molten
- capture
- impurities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 65
- 239000010703 silicon Substances 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims description 27
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 45
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 41
- 239000012535 impurity Substances 0.000 claims abstract description 20
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 66
- 230000008018 melting Effects 0.000 claims description 10
- 238000002844 melting Methods 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 22
- 239000000377 silicon dioxide Substances 0.000 description 11
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000009489 vacuum treatment Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 239000000155 melt Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000000746 purification Methods 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 229910002090 carbon oxide Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 238000011946 reduction process Methods 0.000 description 2
- 238000007670 refining Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- -1 aluminum Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000005261 decarburization Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13287486A JPS62292613A (ja) | 1986-06-10 | 1986-06-10 | 高純度けい素の精製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13287486A JPS62292613A (ja) | 1986-06-10 | 1986-06-10 | 高純度けい素の精製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62292613A true JPS62292613A (ja) | 1987-12-19 |
| JPH0417890B2 JPH0417890B2 (enrdf_load_stackoverflow) | 1992-03-26 |
Family
ID=15091573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13287486A Granted JPS62292613A (ja) | 1986-06-10 | 1986-06-10 | 高純度けい素の精製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62292613A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5182091A (en) * | 1990-05-30 | 1993-01-26 | Kawasaki Steel Corporation | Method and apparatus for purifying silicon |
| JP2006240914A (ja) * | 2005-03-02 | 2006-09-14 | Nippon Steel Corp | シリコンからの炭素除去方法 |
| JP2007302513A (ja) * | 2006-05-11 | 2007-11-22 | Sharp Corp | 炭化珪素とシリコンとの分離方法およびそれに用いる装置 |
| WO2009001547A1 (ja) * | 2007-06-26 | 2008-12-31 | Panasonic Corporation | 金属シリコンの精製方法とシリコン塊の製造方法 |
| CN109052407A (zh) * | 2018-08-22 | 2018-12-21 | 昆明理工大学 | 一种硅切割废料的回收与提纯方法 |
-
1986
- 1986-06-10 JP JP13287486A patent/JPS62292613A/ja active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5182091A (en) * | 1990-05-30 | 1993-01-26 | Kawasaki Steel Corporation | Method and apparatus for purifying silicon |
| JP2006240914A (ja) * | 2005-03-02 | 2006-09-14 | Nippon Steel Corp | シリコンからの炭素除去方法 |
| JP2007302513A (ja) * | 2006-05-11 | 2007-11-22 | Sharp Corp | 炭化珪素とシリコンとの分離方法およびそれに用いる装置 |
| WO2009001547A1 (ja) * | 2007-06-26 | 2008-12-31 | Panasonic Corporation | 金属シリコンの精製方法とシリコン塊の製造方法 |
| US8668895B2 (en) | 2007-06-26 | 2014-03-11 | Panasonic Corporation | Purifying method for metallic silicon and manufacturing method of silicon ingot |
| CN109052407A (zh) * | 2018-08-22 | 2018-12-21 | 昆明理工大学 | 一种硅切割废料的回收与提纯方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0417890B2 (enrdf_load_stackoverflow) | 1992-03-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |