JPS62288433A - クリ−ンル−ム用の空気吹き出し設備 - Google Patents

クリ−ンル−ム用の空気吹き出し設備

Info

Publication number
JPS62288433A
JPS62288433A JP61133035A JP13303586A JPS62288433A JP S62288433 A JPS62288433 A JP S62288433A JP 61133035 A JP61133035 A JP 61133035A JP 13303586 A JP13303586 A JP 13303586A JP S62288433 A JPS62288433 A JP S62288433A
Authority
JP
Japan
Prior art keywords
layer
ventilation
hepa filter
air
resistor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61133035A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0550662B2 (enExample
Inventor
Takao Okada
孝夫 岡田
Toshio Hayashi
利雄 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP61133035A priority Critical patent/JPS62288433A/ja
Publication of JPS62288433A publication Critical patent/JPS62288433A/ja
Publication of JPH0550662B2 publication Critical patent/JPH0550662B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP61133035A 1986-06-09 1986-06-09 クリ−ンル−ム用の空気吹き出し設備 Granted JPS62288433A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61133035A JPS62288433A (ja) 1986-06-09 1986-06-09 クリ−ンル−ム用の空気吹き出し設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61133035A JPS62288433A (ja) 1986-06-09 1986-06-09 クリ−ンル−ム用の空気吹き出し設備

Publications (2)

Publication Number Publication Date
JPS62288433A true JPS62288433A (ja) 1987-12-15
JPH0550662B2 JPH0550662B2 (enExample) 1993-07-29

Family

ID=15095287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61133035A Granted JPS62288433A (ja) 1986-06-09 1986-06-09 クリ−ンル−ム用の空気吹き出し設備

Country Status (1)

Country Link
JP (1) JPS62288433A (enExample)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03250384A (ja) * 1990-02-28 1991-11-08 Matsushita Electric Ind Co Ltd 文字認識装置
JPH03250838A (ja) * 1990-02-28 1991-11-08 Matsushita Electric Ind Co Ltd 留守番電話装置
JPH03284730A (ja) * 1990-03-30 1991-12-16 Hitachi Chem Co Ltd 電気泳動表示装置用表示パネルの製造法
JPH048028U (enExample) * 1990-05-07 1992-01-24
JPH048029U (enExample) * 1990-05-07 1992-01-24
JPH0443750U (enExample) * 1990-08-13 1992-04-14
JPH0868554A (ja) * 1994-08-30 1996-03-12 Sanki Eng Co Ltd ダウンフロー式クリーンルーム
JPH10311556A (ja) * 1997-05-14 1998-11-24 Sanki Eng Co Ltd 空調方法及び空調装置
JP2007013172A (ja) * 2005-06-30 2007-01-18 Asml Holding Nv リソグラフィ用途の層流ガス・カーテン
JP2007266602A (ja) * 2006-03-27 2007-10-11 Asml Netherlands Bv 調整システムおよび少なくとも１つのオブジェクトを備えるアセンブリ、調整システムならびにリソグラフィ装置および方法
CN108302618A (zh) * 2018-01-15 2018-07-20 北京艾瑞克林科技有限公司 一种新风机
JP2020061538A (ja) * 2018-10-12 2020-04-16 國立臺北科技大學 層流装置
KR20220043878A (ko) 2020-09-29 2022-04-05 시바우라 메카트로닉스 가부시끼가이샤 송풍기 및 전자 부품의 실장 장치

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03250384A (ja) * 1990-02-28 1991-11-08 Matsushita Electric Ind Co Ltd 文字認識装置
JPH03250838A (ja) * 1990-02-28 1991-11-08 Matsushita Electric Ind Co Ltd 留守番電話装置
JPH03284730A (ja) * 1990-03-30 1991-12-16 Hitachi Chem Co Ltd 電気泳動表示装置用表示パネルの製造法
JPH048028U (enExample) * 1990-05-07 1992-01-24
JPH048029U (enExample) * 1990-05-07 1992-01-24
JPH0443750U (enExample) * 1990-08-13 1992-04-14
JPH0868554A (ja) * 1994-08-30 1996-03-12 Sanki Eng Co Ltd ダウンフロー式クリーンルーム
JPH10311556A (ja) * 1997-05-14 1998-11-24 Sanki Eng Co Ltd 空調方法及び空調装置
JP2007013172A (ja) * 2005-06-30 2007-01-18 Asml Holding Nv リソグラフィ用途の層流ガス・カーテン
JP2007266602A (ja) * 2006-03-27 2007-10-11 Asml Netherlands Bv 調整システムおよび少なくとも１つのオブジェクトを備えるアセンブリ、調整システムならびにリソグラフィ装置および方法
US7924399B2 (en) 2006-03-27 2011-04-12 Asml Netherlands B.V. Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods
US8441610B2 (en) 2006-03-27 2013-05-14 Asml Netherlands B.V. Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods
CN108302618A (zh) * 2018-01-15 2018-07-20 北京艾瑞克林科技有限公司 一种新风机
CN108302618B (zh) * 2018-01-15 2020-06-02 北京艾瑞克林科技有限公司 一种新风机
JP2020061538A (ja) * 2018-10-12 2020-04-16 國立臺北科技大學 層流装置
KR20220043878A (ko) 2020-09-29 2022-04-05 시바우라 메카트로닉스 가부시끼가이샤 송풍기 및 전자 부품의 실장 장치
CN114322124A (zh) * 2020-09-29 2022-04-12 芝浦机械电子装置株式会社 送风器及电子零件的安装装置

Also Published As

Publication number Publication date
JPH0550662B2 (enExample) 1993-07-29

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term