JPS6228581B2 - - Google Patents

Info

Publication number
JPS6228581B2
JPS6228581B2 JP4979682A JP4979682A JPS6228581B2 JP S6228581 B2 JPS6228581 B2 JP S6228581B2 JP 4979682 A JP4979682 A JP 4979682A JP 4979682 A JP4979682 A JP 4979682A JP S6228581 B2 JPS6228581 B2 JP S6228581B2
Authority
JP
Japan
Prior art keywords
opening
layer
semiconductor layer
semiconductor
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4979682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5874054A (ja
Inventor
Kimyoshi Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4979682A priority Critical patent/JPS5874054A/ja
Publication of JPS5874054A publication Critical patent/JPS5874054A/ja
Publication of JPS6228581B2 publication Critical patent/JPS6228581B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4979682A 1982-03-27 1982-03-27 半導体装置 Granted JPS5874054A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4979682A JPS5874054A (ja) 1982-03-27 1982-03-27 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4979682A JPS5874054A (ja) 1982-03-27 1982-03-27 半導体装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP8629072A Division JPS4943574A (enrdf_load_stackoverflow) 1972-08-30 1972-08-30

Publications (2)

Publication Number Publication Date
JPS5874054A JPS5874054A (ja) 1983-05-04
JPS6228581B2 true JPS6228581B2 (enrdf_load_stackoverflow) 1987-06-22

Family

ID=12841108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4979682A Granted JPS5874054A (ja) 1982-03-27 1982-03-27 半導体装置

Country Status (1)

Country Link
JP (1) JPS5874054A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62183143A (ja) * 1986-02-06 1987-08-11 Nec Corp 半導体装置

Also Published As

Publication number Publication date
JPS5874054A (ja) 1983-05-04

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