JPS6228359A - 真空コンテナ - Google Patents
真空コンテナInfo
- Publication number
- JPS6228359A JPS6228359A JP15601385A JP15601385A JPS6228359A JP S6228359 A JPS6228359 A JP S6228359A JP 15601385 A JP15601385 A JP 15601385A JP 15601385 A JP15601385 A JP 15601385A JP S6228359 A JPS6228359 A JP S6228359A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vacuum container
- base
- carrier
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000002955 isolation Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 86
- 238000003780 insertion Methods 0.000 description 31
- 230000037431 insertion Effects 0.000 description 31
- 238000004140 cleaning Methods 0.000 description 14
- 239000002245 particle Substances 0.000 description 14
- 238000013020 steam cleaning Methods 0.000 description 14
- 238000001035 drying Methods 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000010954 inorganic particle Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011146 organic particle Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Packages (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15601385A JPS6228359A (ja) | 1985-07-17 | 1985-07-17 | 真空コンテナ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15601385A JPS6228359A (ja) | 1985-07-17 | 1985-07-17 | 真空コンテナ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6228359A true JPS6228359A (ja) | 1987-02-06 |
| JPH057270B2 JPH057270B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-01-28 |
Family
ID=15618407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15601385A Granted JPS6228359A (ja) | 1985-07-17 | 1985-07-17 | 真空コンテナ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228359A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63104441A (ja) * | 1986-10-22 | 1988-05-09 | Nec Yamagata Ltd | 半導体装置の保管装置 |
| JPH01219546A (ja) * | 1988-02-26 | 1989-09-01 | Mitsubishi Electric Corp | 半導体ウエハ表面の異物検査方法 |
| JPH01148135U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-04-01 | 1989-10-13 | ||
| WO1995013218A1 (fr) * | 1993-11-12 | 1995-05-18 | Shinwa Corporation | Procede et dispositif pour emballer un article par la pression atmospherique |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0641776U (ja) * | 1992-07-27 | 1994-06-03 | ミヅシマ工業株式会社 | 組み合わせ式ゴルフ場 |
-
1985
- 1985-07-17 JP JP15601385A patent/JPS6228359A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63104441A (ja) * | 1986-10-22 | 1988-05-09 | Nec Yamagata Ltd | 半導体装置の保管装置 |
| JPH01219546A (ja) * | 1988-02-26 | 1989-09-01 | Mitsubishi Electric Corp | 半導体ウエハ表面の異物検査方法 |
| JPH01148135U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-04-01 | 1989-10-13 | ||
| WO1995013218A1 (fr) * | 1993-11-12 | 1995-05-18 | Shinwa Corporation | Procede et dispositif pour emballer un article par la pression atmospherique |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057270B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-01-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |