JPS6227732B2 - - Google Patents

Info

Publication number
JPS6227732B2
JPS6227732B2 JP12471183A JP12471183A JPS6227732B2 JP S6227732 B2 JPS6227732 B2 JP S6227732B2 JP 12471183 A JP12471183 A JP 12471183A JP 12471183 A JP12471183 A JP 12471183A JP S6227732 B2 JPS6227732 B2 JP S6227732B2
Authority
JP
Japan
Prior art keywords
stacking faults
wafer
annealing
silicon
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12471183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5925231A (ja
Inventor
Hirobumi Shimizu
Takaaki Aoshima
Akira Yoshinaka
Yoshimitsu Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12471183A priority Critical patent/JPS5925231A/ja
Publication of JPS5925231A publication Critical patent/JPS5925231A/ja
Publication of JPS6227732B2 publication Critical patent/JPS6227732B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP12471183A 1983-07-11 1983-07-11 シリコンウエ−ハ Granted JPS5925231A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12471183A JPS5925231A (ja) 1983-07-11 1983-07-11 シリコンウエ−ハ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12471183A JPS5925231A (ja) 1983-07-11 1983-07-11 シリコンウエ−ハ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11770675A Division JPS6019144B2 (ja) 1975-10-01 1975-10-01 シリコンウエ−ハの製造法

Publications (2)

Publication Number Publication Date
JPS5925231A JPS5925231A (ja) 1984-02-09
JPS6227732B2 true JPS6227732B2 (enrdf_load_html_response) 1987-06-16

Family

ID=14892210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12471183A Granted JPS5925231A (ja) 1983-07-11 1983-07-11 シリコンウエ−ハ

Country Status (1)

Country Link
JP (1) JPS5925231A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020217326A1 (ja) * 2019-04-23 2020-10-29 マクセル株式会社 ヘッドマウントディスプレイ装置
US11077096B2 (en) 2003-08-29 2021-08-03 Veloxis Pharmaceuticals Inc. Modified release compositions comprising tacrolimus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4078822B2 (ja) * 2001-10-10 2008-04-23 株式会社Ｓｕｍｃｏ シリコンウェーハの製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11077096B2 (en) 2003-08-29 2021-08-03 Veloxis Pharmaceuticals Inc. Modified release compositions comprising tacrolimus
US11129815B2 (en) 2003-08-29 2021-09-28 Veloxis Pharmaceuticals Inc. Solid dispersions comprising tacrolimus
WO2020217326A1 (ja) * 2019-04-23 2020-10-29 マクセル株式会社 ヘッドマウントディスプレイ装置

Also Published As

Publication number Publication date
JPS5925231A (ja) 1984-02-09

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