JPS6227724B2 - - Google Patents

Info

Publication number
JPS6227724B2
JPS6227724B2 JP56088396A JP8839681A JPS6227724B2 JP S6227724 B2 JPS6227724 B2 JP S6227724B2 JP 56088396 A JP56088396 A JP 56088396A JP 8839681 A JP8839681 A JP 8839681A JP S6227724 B2 JPS6227724 B2 JP S6227724B2
Authority
JP
Japan
Prior art keywords
core tube
furnace
heat treatment
furnace core
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56088396A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57202727A (en
Inventor
Keiichi Kagawa
Kyohiro Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8839681A priority Critical patent/JPS57202727A/ja
Publication of JPS57202727A publication Critical patent/JPS57202727A/ja
Publication of JPS6227724B2 publication Critical patent/JPS6227724B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP8839681A 1981-06-09 1981-06-09 Method and device for heat treatment Granted JPS57202727A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8839681A JPS57202727A (en) 1981-06-09 1981-06-09 Method and device for heat treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8839681A JPS57202727A (en) 1981-06-09 1981-06-09 Method and device for heat treatment

Publications (2)

Publication Number Publication Date
JPS57202727A JPS57202727A (en) 1982-12-11
JPS6227724B2 true JPS6227724B2 (enrdf_load_stackoverflow) 1987-06-16

Family

ID=13941627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8839681A Granted JPS57202727A (en) 1981-06-09 1981-06-09 Method and device for heat treatment

Country Status (1)

Country Link
JP (1) JPS57202727A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0787185B2 (ja) * 1985-01-11 1995-09-20 株式会社デンコ− 半導体の熱処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742008Y2 (enrdf_load_stackoverflow) * 1976-10-08 1982-09-16

Also Published As

Publication number Publication date
JPS57202727A (en) 1982-12-11

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