JPS62274619A - 搬送装置及び該装置を用いた半導体ウェーハの搬送方法 - Google Patents

搬送装置及び該装置を用いた半導体ウェーハの搬送方法

Info

Publication number
JPS62274619A
JPS62274619A JP11618286A JP11618286A JPS62274619A JP S62274619 A JPS62274619 A JP S62274619A JP 11618286 A JP11618286 A JP 11618286A JP 11618286 A JP11618286 A JP 11618286A JP S62274619 A JPS62274619 A JP S62274619A
Authority
JP
Japan
Prior art keywords
furnace
temperature
jig
processed
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11618286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332211B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Kimura
博至 木村
Kazuo Nakamura
一雄 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP11618286A priority Critical patent/JPS62274619A/ja
Publication of JPS62274619A publication Critical patent/JPS62274619A/ja
Publication of JPH0332211B2 publication Critical patent/JPH0332211B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP11618286A 1986-05-22 1986-05-22 搬送装置及び該装置を用いた半導体ウェーハの搬送方法 Granted JPS62274619A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11618286A JPS62274619A (ja) 1986-05-22 1986-05-22 搬送装置及び該装置を用いた半導体ウェーハの搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11618286A JPS62274619A (ja) 1986-05-22 1986-05-22 搬送装置及び該装置を用いた半導体ウェーハの搬送方法

Publications (2)

Publication Number Publication Date
JPS62274619A true JPS62274619A (ja) 1987-11-28
JPH0332211B2 JPH0332211B2 (enrdf_load_stackoverflow) 1991-05-10

Family

ID=14680834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11618286A Granted JPS62274619A (ja) 1986-05-22 1986-05-22 搬送装置及び該装置を用いた半導体ウェーハの搬送方法

Country Status (1)

Country Link
JP (1) JPS62274619A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5783743A (en) * 1980-11-08 1982-05-25 Ricoh Co Ltd Damper device for moving body making straight line motion
JPS6079729A (ja) * 1983-10-07 1985-05-07 Hitachi Ltd ウエハ酸化方式

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5783743A (en) * 1980-11-08 1982-05-25 Ricoh Co Ltd Damper device for moving body making straight line motion
JPS6079729A (ja) * 1983-10-07 1985-05-07 Hitachi Ltd ウエハ酸化方式

Also Published As

Publication number Publication date
JPH0332211B2 (enrdf_load_stackoverflow) 1991-05-10

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