JPS6227018A - 濾過装置 - Google Patents

濾過装置

Info

Publication number
JPS6227018A
JPS6227018A JP60165941A JP16594185A JPS6227018A JP S6227018 A JPS6227018 A JP S6227018A JP 60165941 A JP60165941 A JP 60165941A JP 16594185 A JP16594185 A JP 16594185A JP S6227018 A JPS6227018 A JP S6227018A
Authority
JP
Japan
Prior art keywords
container
liquid
filtration
valve
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60165941A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587283B2 (enExample
Inventor
Takao Higuchi
孝雄 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP60165941A priority Critical patent/JPS6227018A/ja
Publication of JPS6227018A publication Critical patent/JPS6227018A/ja
Publication of JPH0587283B2 publication Critical patent/JPH0587283B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Filtration Of Liquid (AREA)
JP60165941A 1985-07-29 1985-07-29 濾過装置 Granted JPS6227018A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60165941A JPS6227018A (ja) 1985-07-29 1985-07-29 濾過装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60165941A JPS6227018A (ja) 1985-07-29 1985-07-29 濾過装置

Publications (2)

Publication Number Publication Date
JPS6227018A true JPS6227018A (ja) 1987-02-05
JPH0587283B2 JPH0587283B2 (enExample) 1993-12-16

Family

ID=15821922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60165941A Granted JPS6227018A (ja) 1985-07-29 1985-07-29 濾過装置

Country Status (1)

Country Link
JP (1) JPS6227018A (enExample)

Also Published As

Publication number Publication date
JPH0587283B2 (enExample) 1993-12-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term