JPS62264633A - オ−プナ−装置の送風ダクト内の排液取出装置 - Google Patents
オ−プナ−装置の送風ダクト内の排液取出装置Info
- Publication number
- JPS62264633A JPS62264633A JP10770086A JP10770086A JPS62264633A JP S62264633 A JPS62264633 A JP S62264633A JP 10770086 A JP10770086 A JP 10770086A JP 10770086 A JP10770086 A JP 10770086A JP S62264633 A JPS62264633 A JP S62264633A
- Authority
- JP
- Japan
- Prior art keywords
- drainage
- duct
- tank
- sulphuric acid
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims abstract description 21
- 239000004065 semiconductor Substances 0.000 claims abstract description 19
- 239000007788 liquid Substances 0.000 claims description 42
- 239000002699 waste material Substances 0.000 claims description 14
- 238000009423 ventilation Methods 0.000 claims description 13
- 238000000605 extraction Methods 0.000 claims description 8
- 239000012530 fluid Substances 0.000 claims description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract description 57
- 235000011149 sulphuric acid Nutrition 0.000 abstract 5
- 239000001117 sulphuric acid Substances 0.000 abstract 5
- 230000005494 condensation Effects 0.000 abstract 1
- 238000009833 condensation Methods 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
- 238000004090 dissolution Methods 0.000 description 9
- 239000002253 acid Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- RHBGITBPARBDPH-ZPUQHVIOSA-N (E,E)-piperic acid Chemical compound OC(=O)\C=C\C=C\C1=CC=C2OCOC2=C1 RHBGITBPARBDPH-ZPUQHVIOSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10770086A JPS62264633A (ja) | 1986-05-13 | 1986-05-13 | オ−プナ−装置の送風ダクト内の排液取出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10770086A JPS62264633A (ja) | 1986-05-13 | 1986-05-13 | オ−プナ−装置の送風ダクト内の排液取出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62264633A true JPS62264633A (ja) | 1987-11-17 |
| JPH0579168B2 JPH0579168B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-11-01 |
Family
ID=14465733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10770086A Granted JPS62264633A (ja) | 1986-05-13 | 1986-05-13 | オ−プナ−装置の送風ダクト内の排液取出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62264633A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1986
- 1986-05-13 JP JP10770086A patent/JPS62264633A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0579168B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-11-01 |