JPH0579168B2 - - Google Patents
Info
- Publication number
- JPH0579168B2 JPH0579168B2 JP10770086A JP10770086A JPH0579168B2 JP H0579168 B2 JPH0579168 B2 JP H0579168B2 JP 10770086 A JP10770086 A JP 10770086A JP 10770086 A JP10770086 A JP 10770086A JP H0579168 B2 JPH0579168 B2 JP H0579168B2
- Authority
- JP
- Japan
- Prior art keywords
- sulfuric acid
- tank
- duct
- air
- waste liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 claims description 43
- 239000002699 waste material Substances 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 18
- 238000001816 cooling Methods 0.000 claims description 17
- 238000009423 ventilation Methods 0.000 claims description 12
- 238000000605 extraction Methods 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 64
- 238000004090 dissolution Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10770086A JPS62264633A (ja) | 1986-05-13 | 1986-05-13 | オ−プナ−装置の送風ダクト内の排液取出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10770086A JPS62264633A (ja) | 1986-05-13 | 1986-05-13 | オ−プナ−装置の送風ダクト内の排液取出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62264633A JPS62264633A (ja) | 1987-11-17 |
| JPH0579168B2 true JPH0579168B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-11-01 |
Family
ID=14465733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10770086A Granted JPS62264633A (ja) | 1986-05-13 | 1986-05-13 | オ−プナ−装置の送風ダクト内の排液取出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62264633A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1986
- 1986-05-13 JP JP10770086A patent/JPS62264633A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62264633A (ja) | 1987-11-17 |