JPH0416429Y2 - - Google Patents
Info
- Publication number
- JPH0416429Y2 JPH0416429Y2 JP7060586U JP7060586U JPH0416429Y2 JP H0416429 Y2 JPH0416429 Y2 JP H0416429Y2 JP 7060586 U JP7060586 U JP 7060586U JP 7060586 U JP7060586 U JP 7060586U JP H0416429 Y2 JPH0416429 Y2 JP H0416429Y2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- air
- semiconductor
- sulfuric acid
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 30
- 239000007788 liquid Substances 0.000 claims description 26
- 239000007921 spray Substances 0.000 claims description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 56
- 238000004090 dissolution Methods 0.000 description 17
- 238000001816 cooling Methods 0.000 description 9
- 239000002699 waste material Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7060586U JPH0416429Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-13 | 1986-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7060586U JPH0416429Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-13 | 1986-05-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62182543U JPS62182543U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-19 |
| JPH0416429Y2 true JPH0416429Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-04-13 |
Family
ID=30912393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7060586U Expired JPH0416429Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-05-13 | 1986-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416429Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1986
- 1986-05-13 JP JP7060586U patent/JPH0416429Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62182543U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-19 |