JPS6226183B2 - - Google Patents

Info

Publication number
JPS6226183B2
JPS6226183B2 JP20154582A JP20154582A JPS6226183B2 JP S6226183 B2 JPS6226183 B2 JP S6226183B2 JP 20154582 A JP20154582 A JP 20154582A JP 20154582 A JP20154582 A JP 20154582A JP S6226183 B2 JPS6226183 B2 JP S6226183B2
Authority
JP
Japan
Prior art keywords
crystal
groove
shaped
side surfaces
scratch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20154582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5990940A (ja
Inventor
Hideaki Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP57201545A priority Critical patent/JPS5990940A/ja
Publication of JPS5990940A publication Critical patent/JPS5990940A/ja
Publication of JPS6226183B2 publication Critical patent/JPS6226183B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P54/00—

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
  • Semiconductor Lasers (AREA)
JP57201545A 1982-11-17 1982-11-17 半導体素子の製造方法 Granted JPS5990940A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57201545A JPS5990940A (ja) 1982-11-17 1982-11-17 半導体素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57201545A JPS5990940A (ja) 1982-11-17 1982-11-17 半導体素子の製造方法

Publications (2)

Publication Number Publication Date
JPS5990940A JPS5990940A (ja) 1984-05-25
JPS6226183B2 true JPS6226183B2 (enExample) 1987-06-08

Family

ID=16442821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57201545A Granted JPS5990940A (ja) 1982-11-17 1982-11-17 半導体素子の製造方法

Country Status (1)

Country Link
JP (1) JPS5990940A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6116591A (ja) * 1984-07-02 1986-01-24 Rohm Co Ltd 半導体レ−ザのチツプ製造方法
GB2269268B (en) * 1992-07-31 1995-11-29 Northern Telecom Ltd Semiconductor slice cleaving
DE10101737A1 (de) * 2001-01-16 2002-07-25 Osram Opto Semiconductors Gmbh Verfahren zum Vereinzeln von Wafern in Chips

Also Published As

Publication number Publication date
JPS5990940A (ja) 1984-05-25

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