JPS6225270B2 - - Google Patents
Info
- Publication number
- JPS6225270B2 JPS6225270B2 JP53089446A JP8944678A JPS6225270B2 JP S6225270 B2 JPS6225270 B2 JP S6225270B2 JP 53089446 A JP53089446 A JP 53089446A JP 8944678 A JP8944678 A JP 8944678A JP S6225270 B2 JPS6225270 B2 JP S6225270B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- epitaxial layer
- layer
- recess
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
- H10D84/641—Combinations of only vertical BJTs
- H10D84/642—Combinations of non-inverted vertical BJTs of the same conductivity type having different characteristics, e.g. Darlington transistors
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8944678A JPS5516443A (en) | 1978-07-24 | 1978-07-24 | Semiconductor device and its production method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8944678A JPS5516443A (en) | 1978-07-24 | 1978-07-24 | Semiconductor device and its production method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5516443A JPS5516443A (en) | 1980-02-05 |
| JPS6225270B2 true JPS6225270B2 (enrdf_load_stackoverflow) | 1987-06-02 |
Family
ID=13970898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8944678A Granted JPS5516443A (en) | 1978-07-24 | 1978-07-24 | Semiconductor device and its production method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5516443A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6235567A (ja) * | 1985-08-08 | 1987-02-16 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
-
1978
- 1978-07-24 JP JP8944678A patent/JPS5516443A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5516443A (en) | 1980-02-05 |
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