JPS622428B2 - - Google Patents

Info

Publication number
JPS622428B2
JPS622428B2 JP53014973A JP1497378A JPS622428B2 JP S622428 B2 JPS622428 B2 JP S622428B2 JP 53014973 A JP53014973 A JP 53014973A JP 1497378 A JP1497378 A JP 1497378A JP S622428 B2 JPS622428 B2 JP S622428B2
Authority
JP
Japan
Prior art keywords
mercury
rare gas
discharge lamp
input
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53014973A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54108478A (en
Inventor
Takehiro Kira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP1497378A priority Critical patent/JPS54108478A/ja
Publication of JPS54108478A publication Critical patent/JPS54108478A/ja
Publication of JPS622428B2 publication Critical patent/JPS622428B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Discharge Lamp (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP1497378A 1978-02-14 1978-02-14 Printing or transcribing method of semiconductor and discharge lamp suitable for printing or transcription Granted JPS54108478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1497378A JPS54108478A (en) 1978-02-14 1978-02-14 Printing or transcribing method of semiconductor and discharge lamp suitable for printing or transcription

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1497378A JPS54108478A (en) 1978-02-14 1978-02-14 Printing or transcribing method of semiconductor and discharge lamp suitable for printing or transcription

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP57067257A Division JPS57185663A (en) 1982-04-23 1982-04-23 Lighting of mercury rare-gas electric-discharge lamp

Publications (2)

Publication Number Publication Date
JPS54108478A JPS54108478A (en) 1979-08-25
JPS622428B2 true JPS622428B2 (cg-RX-API-DMAC7.html) 1987-01-20

Family

ID=11875911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1497378A Granted JPS54108478A (en) 1978-02-14 1978-02-14 Printing or transcribing method of semiconductor and discharge lamp suitable for printing or transcription

Country Status (1)

Country Link
JP (1) JPS54108478A (cg-RX-API-DMAC7.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57185663A (en) * 1982-04-23 1982-11-15 Ushio Inc Lighting of mercury rare-gas electric-discharge lamp
JPS6070452A (ja) * 1983-09-28 1985-04-22 Nippon Kogaku Kk <Nikon> 露光装置
JPS6120322A (ja) * 1984-07-07 1986-01-29 Ushio Inc 水銀灯による半導体ウエハ−材料の露光方法
JPS6120325A (ja) * 1984-07-07 1986-01-29 Ushio Inc 水銀灯による半導体ウエハ−材料の露光方法
JPS6120324A (ja) * 1984-07-07 1986-01-29 Ushio Inc 水銀灯による半導体ウエハ−材料の露光方法
JPS6120323A (ja) * 1984-07-07 1986-01-29 Ushio Inc 水銀灯による半導体ウエハ−材料の露光方法
JPS6120326A (ja) * 1984-07-07 1986-01-29 Ushio Inc 水銀灯による半導体ウエハ−材料の露光方法
JPS6119940A (ja) * 1984-07-07 1986-01-28 Mitsubishi Heavy Ind Ltd 吸気及び排気方法
JP2781555B2 (ja) * 1987-08-21 1998-07-30 株式会社日立製作所 超高圧水銀灯

Also Published As

Publication number Publication date
JPS54108478A (en) 1979-08-25

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