JPS62241876A - 窒化珪素焼結体の製造法 - Google Patents
窒化珪素焼結体の製造法Info
- Publication number
- JPS62241876A JPS62241876A JP61068287A JP6828786A JPS62241876A JP S62241876 A JPS62241876 A JP S62241876A JP 61068287 A JP61068287 A JP 61068287A JP 6828786 A JP6828786 A JP 6828786A JP S62241876 A JPS62241876 A JP S62241876A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- sintered body
- nitride sintered
- sintering aid
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 62
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000000843 powder Substances 0.000 claims description 29
- 239000001301 oxygen Substances 0.000 claims description 27
- 229910052760 oxygen Inorganic materials 0.000 claims description 27
- 238000005245 sintering Methods 0.000 claims description 19
- 239000002994 raw material Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 16
- 239000002002 slurry Substances 0.000 claims description 12
- 238000002360 preparation method Methods 0.000 claims description 10
- 239000013078 crystal Substances 0.000 claims description 9
- 229910021645 metal ion Inorganic materials 0.000 claims description 9
- 238000000465 moulding Methods 0.000 claims description 9
- -1 oxygen ions Chemical class 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000002441 X-ray diffraction Methods 0.000 claims description 6
- 239000012298 atmosphere Substances 0.000 claims description 5
- 238000001354 calcination Methods 0.000 claims description 4
- 238000010304 firing Methods 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000010298 pulverizing process Methods 0.000 claims description 2
- 230000000877 morphologic effect Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 18
- 230000003647 oxidation Effects 0.000 description 18
- 239000012071 phase Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001238 wet grinding Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61068287A JPS62241876A (ja) | 1986-03-28 | 1986-03-28 | 窒化珪素焼結体の製造法 |
| DE19873709137 DE3709137A1 (de) | 1986-03-28 | 1987-03-20 | Siliciumnitrid-sinterkoerper, verfahren zu ihrer herstellung und siliciumnitridpulver |
| DE3744692A DE3744692C2 (de) | 1986-03-28 | 1987-03-20 | Siliciumnitridpulver und Verfahren zu seiner Herstellung |
| US07/028,724 US4818733A (en) | 1986-03-28 | 1987-03-23 | Silicon nitride sintered bodies and a method of producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61068287A JPS62241876A (ja) | 1986-03-28 | 1986-03-28 | 窒化珪素焼結体の製造法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4016398A Division JP2577155B2 (ja) | 1992-01-31 | 1992-01-31 | 窒化珪素焼結体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62241876A true JPS62241876A (ja) | 1987-10-22 |
| JPH0321500B2 JPH0321500B2 (enrdf_load_stackoverflow) | 1991-03-22 |
Family
ID=13369400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61068287A Granted JPS62241876A (ja) | 1986-03-28 | 1986-03-28 | 窒化珪素焼結体の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62241876A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02107509A (ja) * | 1988-08-31 | 1990-04-19 | Bayer Ag | 表面特性が改善された窒化硅素粉末及びその製造法 |
| JP2007230788A (ja) * | 2006-02-27 | 2007-09-13 | Kyocera Corp | 窒化珪素質焼結体 |
-
1986
- 1986-03-28 JP JP61068287A patent/JPS62241876A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02107509A (ja) * | 1988-08-31 | 1990-04-19 | Bayer Ag | 表面特性が改善された窒化硅素粉末及びその製造法 |
| JP2007230788A (ja) * | 2006-02-27 | 2007-09-13 | Kyocera Corp | 窒化珪素質焼結体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0321500B2 (enrdf_load_stackoverflow) | 1991-03-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |