JPS6223581Y2 - - Google Patents
Info
- Publication number
- JPS6223581Y2 JPS6223581Y2 JP19822984U JP19822984U JPS6223581Y2 JP S6223581 Y2 JPS6223581 Y2 JP S6223581Y2 JP 19822984 U JP19822984 U JP 19822984U JP 19822984 U JP19822984 U JP 19822984U JP S6223581 Y2 JPS6223581 Y2 JP S6223581Y2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- coating
- cap
- coating liquid
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011248 coating agent Substances 0.000 claims description 55
- 238000000576 coating method Methods 0.000 claims description 55
- 239000007788 liquid Substances 0.000 claims description 28
- 239000002904 solvent Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 4
- 239000012298 atmosphere Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 21
- 235000012431 wafers Nutrition 0.000 description 20
- 239000003795 chemical substances by application Substances 0.000 description 10
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19822984U JPS60136777U (ja) | 1984-12-29 | 1984-12-29 | 回転塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19822984U JPS60136777U (ja) | 1984-12-29 | 1984-12-29 | 回転塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60136777U JPS60136777U (ja) | 1985-09-11 |
| JPS6223581Y2 true JPS6223581Y2 (enExample) | 1987-06-16 |
Family
ID=30757043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19822984U Granted JPS60136777U (ja) | 1984-12-29 | 1984-12-29 | 回転塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60136777U (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0795514B2 (ja) * | 1987-06-30 | 1995-10-11 | 富士通株式会社 | レジスト塗布装置 |
| JP4626196B2 (ja) * | 2004-07-05 | 2011-02-02 | セイコーエプソン株式会社 | 液滴吐出装置、および電気光学装置の製造方法 |
-
1984
- 1984-12-29 JP JP19822984U patent/JPS60136777U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60136777U (ja) | 1985-09-11 |
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