JPS60136777U - 回転塗布装置 - Google Patents

回転塗布装置

Info

Publication number
JPS60136777U
JPS60136777U JP19822984U JP19822984U JPS60136777U JP S60136777 U JPS60136777 U JP S60136777U JP 19822984 U JP19822984 U JP 19822984U JP 19822984 U JP19822984 U JP 19822984U JP S60136777 U JPS60136777 U JP S60136777U
Authority
JP
Japan
Prior art keywords
nozzle
cap
coating liquid
solvent
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19822984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6223581Y2 (enExample
Inventor
文雄 崎谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tazmo Co Ltd
Original Assignee
Tazmo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tazmo Co Ltd filed Critical Tazmo Co Ltd
Priority to JP19822984U priority Critical patent/JPS60136777U/ja
Publication of JPS60136777U publication Critical patent/JPS60136777U/ja
Application granted granted Critical
Publication of JPS6223581Y2 publication Critical patent/JPS6223581Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP19822984U 1984-12-29 1984-12-29 回転塗布装置 Granted JPS60136777U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19822984U JPS60136777U (ja) 1984-12-29 1984-12-29 回転塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19822984U JPS60136777U (ja) 1984-12-29 1984-12-29 回転塗布装置

Publications (2)

Publication Number Publication Date
JPS60136777U true JPS60136777U (ja) 1985-09-11
JPS6223581Y2 JPS6223581Y2 (enExample) 1987-06-16

Family

ID=30757043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19822984U Granted JPS60136777U (ja) 1984-12-29 1984-12-29 回転塗布装置

Country Status (1)

Country Link
JP (1) JPS60136777U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS648621A (en) * 1987-06-30 1989-01-12 Fujitsu Ltd Resist coating apparatus
JP2006015302A (ja) * 2004-07-05 2006-01-19 Seiko Epson Corp 液滴吐出装置、および電気光学装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS648621A (en) * 1987-06-30 1989-01-12 Fujitsu Ltd Resist coating apparatus
JP2006015302A (ja) * 2004-07-05 2006-01-19 Seiko Epson Corp 液滴吐出装置、および電気光学装置の製造方法

Also Published As

Publication number Publication date
JPS6223581Y2 (enExample) 1987-06-16

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