JPS62235261A - 窒化ケイ素の高密度焼結体の製造方法 - Google Patents

窒化ケイ素の高密度焼結体の製造方法

Info

Publication number
JPS62235261A
JPS62235261A JP61078340A JP7834086A JPS62235261A JP S62235261 A JPS62235261 A JP S62235261A JP 61078340 A JP61078340 A JP 61078340A JP 7834086 A JP7834086 A JP 7834086A JP S62235261 A JPS62235261 A JP S62235261A
Authority
JP
Japan
Prior art keywords
sintered body
pressure
silicon nitride
atm
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61078340A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0375506B2 (enrdf_load_stackoverflow
Inventor
浩明 西尾
史郎 鳥塚
高瀬　朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp
Priority to JP61078340A priority Critical patent/JPS62235261A/ja
Publication of JPS62235261A publication Critical patent/JPS62235261A/ja
Publication of JPH0375506B2 publication Critical patent/JPH0375506B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP61078340A 1986-04-07 1986-04-07 窒化ケイ素の高密度焼結体の製造方法 Granted JPS62235261A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61078340A JPS62235261A (ja) 1986-04-07 1986-04-07 窒化ケイ素の高密度焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61078340A JPS62235261A (ja) 1986-04-07 1986-04-07 窒化ケイ素の高密度焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS62235261A true JPS62235261A (ja) 1987-10-15
JPH0375506B2 JPH0375506B2 (enrdf_load_stackoverflow) 1991-12-02

Family

ID=13659251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61078340A Granted JPS62235261A (ja) 1986-04-07 1986-04-07 窒化ケイ素の高密度焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPS62235261A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01215762A (ja) * 1988-02-24 1989-08-29 Fujitsu Ltd 窒化硅素焼結体の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01215762A (ja) * 1988-02-24 1989-08-29 Fujitsu Ltd 窒化硅素焼結体の製造方法

Also Published As

Publication number Publication date
JPH0375506B2 (enrdf_load_stackoverflow) 1991-12-02

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