JPS62235261A - 窒化ケイ素の高密度焼結体の製造方法 - Google Patents
窒化ケイ素の高密度焼結体の製造方法Info
- Publication number
- JPS62235261A JPS62235261A JP61078340A JP7834086A JPS62235261A JP S62235261 A JPS62235261 A JP S62235261A JP 61078340 A JP61078340 A JP 61078340A JP 7834086 A JP7834086 A JP 7834086A JP S62235261 A JPS62235261 A JP S62235261A
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- pressure
- silicon nitride
- atm
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61078340A JPS62235261A (ja) | 1986-04-07 | 1986-04-07 | 窒化ケイ素の高密度焼結体の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61078340A JPS62235261A (ja) | 1986-04-07 | 1986-04-07 | 窒化ケイ素の高密度焼結体の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62235261A true JPS62235261A (ja) | 1987-10-15 |
JPH0375506B2 JPH0375506B2 (enrdf_load_stackoverflow) | 1991-12-02 |
Family
ID=13659251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61078340A Granted JPS62235261A (ja) | 1986-04-07 | 1986-04-07 | 窒化ケイ素の高密度焼結体の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62235261A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01215762A (ja) * | 1988-02-24 | 1989-08-29 | Fujitsu Ltd | 窒化硅素焼結体の製造方法 |
-
1986
- 1986-04-07 JP JP61078340A patent/JPS62235261A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01215762A (ja) * | 1988-02-24 | 1989-08-29 | Fujitsu Ltd | 窒化硅素焼結体の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0375506B2 (enrdf_load_stackoverflow) | 1991-12-02 |
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