JPS62227477A - ジルコニア薄膜の製造方法 - Google Patents

ジルコニア薄膜の製造方法

Info

Publication number
JPS62227477A
JPS62227477A JP7121186A JP7121186A JPS62227477A JP S62227477 A JPS62227477 A JP S62227477A JP 7121186 A JP7121186 A JP 7121186A JP 7121186 A JP7121186 A JP 7121186A JP S62227477 A JPS62227477 A JP S62227477A
Authority
JP
Japan
Prior art keywords
butoxyzirconium
zirconia
spray solution
thin film
acetylacetate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7121186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0411491B2 (enrdf_load_html_response
Inventor
Isao Yagi
八木　績
Yutaka Hagiwara
裕 萩原
Katsutoshi Kakizawa
柿沢　勝利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kawai Musical Instruments Manufacturing Co Ltd
Original Assignee
Kawai Musical Instruments Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawai Musical Instruments Manufacturing Co Ltd filed Critical Kawai Musical Instruments Manufacturing Co Ltd
Priority to JP7121186A priority Critical patent/JPS62227477A/ja
Publication of JPS62227477A publication Critical patent/JPS62227477A/ja
Publication of JPH0411491B2 publication Critical patent/JPH0411491B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP7121186A 1986-03-31 1986-03-31 ジルコニア薄膜の製造方法 Granted JPS62227477A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7121186A JPS62227477A (ja) 1986-03-31 1986-03-31 ジルコニア薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7121186A JPS62227477A (ja) 1986-03-31 1986-03-31 ジルコニア薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS62227477A true JPS62227477A (ja) 1987-10-06
JPH0411491B2 JPH0411491B2 (enrdf_load_html_response) 1992-02-28

Family

ID=13454118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7121186A Granted JPS62227477A (ja) 1986-03-31 1986-03-31 ジルコニア薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS62227477A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238964A (ja) * 1988-07-29 1990-02-08 Tanaka Kikinzoku Kogyo Kk 薄膜酸素センサの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5841724A (ja) * 1981-09-02 1983-03-11 Nippon Soda Co Ltd 金属酸化被膜形成組成物
JPS59209212A (ja) * 1983-05-12 1984-11-27 鐘淵化学工業株式会社 透明性強誘電体薄膜およびその製造法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5841724A (ja) * 1981-09-02 1983-03-11 Nippon Soda Co Ltd 金属酸化被膜形成組成物
JPS59209212A (ja) * 1983-05-12 1984-11-27 鐘淵化学工業株式会社 透明性強誘電体薄膜およびその製造法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238964A (ja) * 1988-07-29 1990-02-08 Tanaka Kikinzoku Kogyo Kk 薄膜酸素センサの製造方法

Also Published As

Publication number Publication date
JPH0411491B2 (enrdf_load_html_response) 1992-02-28

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