JPS62226895A - ひ化ガリウム単結晶の成長方法 - Google Patents

ひ化ガリウム単結晶の成長方法

Info

Publication number
JPS62226895A
JPS62226895A JP7036386A JP7036386A JPS62226895A JP S62226895 A JPS62226895 A JP S62226895A JP 7036386 A JP7036386 A JP 7036386A JP 7036386 A JP7036386 A JP 7036386A JP S62226895 A JPS62226895 A JP S62226895A
Authority
JP
Japan
Prior art keywords
single crystal
gallium arsenide
added
semi
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7036386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0555480B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hisanori Fujita
尚徳 藤田
Eiichiro Nishihara
英一郎 西原
Katsushi Fujii
克司 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Monsanto Chemical Co
Mitsubishi Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Monsanto Chemical Co, Mitsubishi Chemical Industries Ltd filed Critical Mitsubishi Monsanto Chemical Co
Priority to JP7036386A priority Critical patent/JPS62226895A/ja
Publication of JPS62226895A publication Critical patent/JPS62226895A/ja
Publication of JPH0555480B2 publication Critical patent/JPH0555480B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP7036386A 1986-03-28 1986-03-28 ひ化ガリウム単結晶の成長方法 Granted JPS62226895A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7036386A JPS62226895A (ja) 1986-03-28 1986-03-28 ひ化ガリウム単結晶の成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7036386A JPS62226895A (ja) 1986-03-28 1986-03-28 ひ化ガリウム単結晶の成長方法

Publications (2)

Publication Number Publication Date
JPS62226895A true JPS62226895A (ja) 1987-10-05
JPH0555480B2 JPH0555480B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-17

Family

ID=13429275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7036386A Granted JPS62226895A (ja) 1986-03-28 1986-03-28 ひ化ガリウム単結晶の成長方法

Country Status (1)

Country Link
JP (1) JPS62226895A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0555480B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-17

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees